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Cathodoluminescence

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Spectroscopic Analysis of Optoelectronic Semiconductors

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 202))

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Abstract

This chapter deals with a technique combining the optical spectroscopy with the high spatial resolution of the electron microscopes, cathodoluminescence (CL). This chapter is tightly related to Chap. 4, in the sense that the light emission mechanisms are similar, but the main difference lies in the excitation source. We present in this chapter the main experimental issues of this technique. First, the excitation of the luminescence emission with an electron beam is carefully described, looking at both the “information depth” and the lateral spread, both of them governed by the energy of the electrons. The main experimental issues, and the imaging procedures are analyzed. A series of case applications, in which the CL technique provides a plus of analytical possibilities, is presented, and applied to either bulk semiconductors, devices, and nanostructures.

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Authors and Affiliations

  1. Condensed Matter Physics, University of Valladolid, Valladolid, Spain

    Juan Jimenez

  2. Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Berlin, Germany

    Jens W. Tomm

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  1. Juan Jimenez
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  2. Jens W. Tomm
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Correspondence to Juan Jimenez .

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Jimenez, J., Tomm, J.W. (2016). Cathodoluminescence. In: Spectroscopic Analysis of Optoelectronic Semiconductors. Springer Series in Optical Sciences, vol 202. Springer, Cham. https://doi.org/10.1007/978-3-319-42349-4_5

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