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Channeling and Backscatter Imaging

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Book cover Helium Ion Microscopy

Part of the book series: NanoScience and Technology ((NANO))

Abstract

While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.

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Notes

  1. 1.

    For 30 keV He into Au \(E'=1.3\) MeV, and for Si \(E'=0.12\) MeV.

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Acknowledgments

We want to thank B. Doyle for providing the channeling figures and the texts he shared with us, as well as for the insightful discussions. We also acknowledge support from the Dutch Technology Foundation STW, which is part of the Netherlands Organization for Scientific Research (NWO), and which is funded in part by the Dutch Ministry of Economic Affairs.

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Authors and Affiliations

  1. Institute for Ion Beam Physics and Materials Research, Helmholtz–Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328, Dresden, Germany

    Gregor Hlawacek

  2. Physics of Interfaces and Nanomaterials, Univerity of Twente, Enschede, The Netherlands

    Vasilisa Veligura, Raoul van Gastel & Bene Poelsema

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  1. Gregor Hlawacek
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  2. Vasilisa Veligura
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  4. Bene Poelsema
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Correspondence to Gregor Hlawacek .

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Editors and Affiliations

  1. Inst. for Ion Beam Physics and Materials Research, Hemholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

    Gregor Hlawacek

  2. Physics of Supramolecular Systems and Surfaces, Bielefeld University, Bielefeld, Germany

    Armin Gölzhäuser

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Hlawacek, G., Veligura, V., van Gastel, R., Poelsema, B. (2016). Channeling and Backscatter Imaging. In: Hlawacek, G., Gölzhäuser, A. (eds) Helium Ion Microscopy. NanoScience and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-41990-9_9

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