MEMS Lorentz Force Magnetometers

  • Agustín Leobardo Herrera-MayEmail author
  • Francisco López-Huerta
  • Luz Antonio Aguilera-Cortés
Part of the Smart Sensors, Measurement and Instrumentation book series (SSMI, volume 19)


Lorentz force magnetometers based on microelectromechanical systems (MEMS) have several advantages such as small size, low power consumption, high sensitivity, wide dynamic range, high resolution, and low cost batch fabrication. These magnetometers have potential applications in biomedicine, navigation systems, telecommunications, automotive industry, space satellites, and non-destructive testing. This chapter includes the development of MEMS magnetometers composed by resonant structures that use the Lorentz force and different signal processing techniques. In addition, it presents the operation principle, sensing techniques, fabrication processes, applications, and challenges of MEMS magnetometers. Future applications will consider the integration of magnetometers with different devices (e.g., accelerometers, gyroscopes, energy harvesting and temperature sensors) on a single chip.


Lorentz Force Inertial Measurement Unit Wheatstone Bridge Resonant Structure Vacuum Packaging 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work was partially supported by Sandia National Laboratory’s University Alliance Program, FORDECYT-CONACYT through grant 115976, and projects PRODEP “Estudio de Dispositivos Electrónicos y Electromecánicos con Potencial Aplicación en Fisiología y Optoelectrónica” and “Sistema Electrónico de Medición de Campo Magnético Residual de Estructuras Ferromagnéticas”. The authors would like to thank Dr. Eduard Figueras of IMB-CNM (CSIC) for his collaboration into the fabrication of MEMS magnetometers and B.S. Fernando Bravo-Barrera of LAPEM for his assistance with the SEM images.


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Copyright information

© Springer International Publishing Switzerland 2017

Authors and Affiliations

  • Agustín Leobardo Herrera-May
    • 1
    Email author
  • Francisco López-Huerta
    • 2
  • Luz Antonio Aguilera-Cortés
    • 3
  1. 1.Micro and Nanotechnology Research CenterUniversidad VeracruzanaBoca Del RioMexico
  2. 2.Engineering FacultyUniversidad VeracruzanaBoca Del RioMexico
  3. 3.Depto. Ingeniería MecánicaDICIS, Universidad de GuanajuatoSalamancaMexico

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