Abstract
The increasing demand of miniaturization, low power consumption, compactness and portability of the equipment has urged the sensors’ size to be the only selection criterion for a magnetometer. Applications, such as magnetic micro-beads, micromagnetic scanning, non-destructive testing and medical applications like magnetic drug delivery dictate the requirement of magnetic sensors that are smaller in size and own single side measurement capability. To cater those needs, it is utmost important to explore and apply new principles governing nano-scale science and state-of-the-art fabrication technology. This chapter showcases the recent advances in magnetic field planar sensors that could be used to measure magnetic field with the privilege of non-destructive measurements and single side access to the sample.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
A. Mahdi, L. Panina, D. Mapps, Some new horizons in magnetic sensing: high-T c SQUIDs, GMR and GMI materials. Sens. Actuators, A 105, 271–285 (2003)
S.M. Sze, Semiconductor Sensors (Wiley, New York, 1994)
P. Ripka, Sensors based on bulk soft magnetic materials: advances and challenges. J. Magn. Magn. Mater. 320, 2466–2473 (2008)
A. Ozbay, E. Nowak, A. Edelstein, G. Fischer, C. Nordman, S.F. Cheng, Magnetic-field dependence of the noise in a magnetoresistive sensor having MEMS flux concentrators. Trans. Magn. IEEE 42, 3306–3308 (2006)
W. Lee, M. Toney, D. Mauri, High magnetoresistance in sputtered permalloy thin films through growth on seed layers of (Ni 0.81 Fe 0.19) 1-x Cr x. Trans. Magn. IEEE 36, 381–385 (2000)
P. Ciureanu, S. Middelhoek, Thin film resistive sensors (CRC Press, Boca Raton, 1992)
R.S. Popovic, Hall effect devices (CRC Press, Boca Raton, 2003)
P. Ripka, M. Janošek, Advances in magnetic field sensors (2010)
C. Lei, R. Wang, Y. Zhou, Z. Zhou, MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils. Microsyst. Technol. 15, 969–972 (2009)
Y. Haddab, V. Mosser, M. Lysowec, J. Suski, L. Demeus, C. Renaux, D. Flandre, in Low-noise SOI Hall devices, SPIE’s First International Symposium on Fluctuations and Noise (2003), pp. 196–203
A. Kerlain, V. Mosser, Low frequency noise suppression in III-V Hall magnetic microsystems with integrated switches. Sens. Lett. 5, 192–195 (2007)
P. Kejik, G. Boero, M. Demierre, R. Popovic, An integrated micro-hall probe for scanning magnetic microscopy. Sens. Actuators, A 129, 212–215 (2006)
J. Lenz, A.S. Edelstein, Magnetic sensors and their applications. Sens. J. IEEE 6, 631–649 (2006)
A. Bertoldi, D. Bassi, L. Ricci, D. Covi, S. Varas, Magnetoresistive magnetometer with improved bandwidth and response characteristics. Rev. Sci. Instrum. 76, 065106-065106-6 (2005)
C.-C. Lu, J. Huang, P.-K. Chiu, S.-L. Chiu, J.-T. Jeng, High-sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design. Sensors 14, 13815–13829 (2014)
Y. Cai, J. Qiu, L. Jiang, Planar three-axis magnetometer (2013)
S. Mukhopadhyay, Development of a novel planar mesh type micro-magnetic sensor for the quality inspection of electroplated materials. Sens. 2002 Proc. IEEE 2002, 741–746 (2002)
S. Vernon, The universal impedance diagram of the ferrite pot core eddy current transducer. Trans. Magn. IEEE 25, 2639–2645 (1989)
J. Bowler, H. Sabbagh, L. Sabbagh, The reduced impedance function for cup-core eddy-current probes. Trans. Magn. IEEE 25, 2646–2649 (1989)
J.C. Moulder, E. Uzal, J.H. Rose, Thickness and conductivity of metallic layers from eddy current measurements. Rev. Sci. Instrum. 63, 3455–3465 (1992)
S.C. Mukhopadhyay, S. Yamada, M. Iwahara, Investigation of near-surface material properties using planar type meander coil. JSAEM Stud. Appl. Electromagnet. Mech. 11, 61–69 (2001)
S.C. Mukhopadhyay, Planar electromagnetic sensors: characterization, applications and experimental results (Planare elektromagnetische Sensoren: Charakterisierung, Anwendungen und experimentelle Ergebnisse). Tm-Technisches Messen 74, 290–297 (2007)
S. Mukhopadhyay, C. Gooneratne, G.S. Gupta, S. Yamada, Characterization and comparative evaluation of novel planar electromagnetic sensors. Trans. Magn. IEEE 41, 3658–3660 (2005)
N.J. Goldfine, K.G. Rhoads, K.E. Walrath, D.C. Clark, Method for characterizing coating and substrates. Google Patents, (2002)
N.J. Goldfine, Conformable, meandering winding magnetometer (MWM) for flaw and materials characterization in ferrous and nonferrous metals. Am. Soc. Mech. Eng. Press. Vessels Pip. Div. (Publication) PVP 352, 39–43 (1997)
N.J. Goldfine, Magnetometers for improved materials characterization in aerospace applications. Mater. Eval. 51, 396–405 (1993)
S. Yamada, M. Katou, M. Iwahara, F.P. Dawson, Defect images by planar ECT probe of Meander-Mesh coils. Trans. Magn. IEEE 32, 4956–4958 (1996)
S.C. Mukhopadhyay, C.P. Gooneratne, G.S. Gupta, S.N. Demidenko, A low-cost sensing system for quality monitoring of dairy products. IEEE Trans. Instrum. Meas. 55, 1331–1338 (2006)
S.C. Mukhopadhyay, G.S. Gupta, J.D. Woolley, S.N. Demidenko, Saxophone reed inspection employing planar electromagnetic sensors. IEEE Trans. Instrum. Meas. 56, 2492–2503 (2007)
M.A.M. Yunus, S.C. Mukhopadhyay, Novel planar electromagnetic sensors for detection of nitrates and contamination in natural water sources. IEEE Sens. J 11, 1440–1447 (2011)
A.R.M. Syaifudin, P. Yu, S. Mukhopadhyay, M.J. Haji-Sheikh, J. Vanderford, Performance evaluation of a new novel planar interdigital sensors (2010), pp. 731–736
M.A.M. Yunus, G.R. Mendez, S.C. Mukhopadhyay, Development of a low cost system for nitrate and contamination detections in natural water supply based on a planar electromagnetic sensor. Instrum. Measur. Technol. Conf. (I2MTC), 2011 IEEE 2011, 1–6 (2011)
S.M. Djuric, L.F. Nagy, M.S. Damnjanovic, N.M. Djuric, L.D. Zivanov, A novel application of planar-type meander sensors. Microelectron. Int. 28, 41–49 (2011)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2017 Springer International Publishing Switzerland
About this chapter
Cite this chapter
Zia, A.I., Mukhopadhyay, S.C. (2017). Planar Magnetometers. In: Grosz, A., Haji-Sheikh, M., Mukhopadhyay, S. (eds) High Sensitivity Magnetometers. Smart Sensors, Measurement and Instrumentation, vol 19. Springer, Cham. https://doi.org/10.1007/978-3-319-34070-8_12
Download citation
DOI: https://doi.org/10.1007/978-3-319-34070-8_12
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-34068-5
Online ISBN: 978-3-319-34070-8
eBook Packages: EngineeringEngineering (R0)