Abstract
Characterization of microelectromechanical systems, MEMS structures is important for their reliability, specifically for life-sustaining applications. Due to size effect, testing must be done at microscale under the same conditions the components are utilized. Microtesting systems have been developed and used for metallic and nonmetallic MEMS components. Other methods including on-the-chip characterization have been developed and utilized. Details of development or utilization of various micro-characterization techniques are presented in this chapter. There are many issues related to mechanical properties, some of which are briefly described here. Modeling MEMS both computationally and mathematically are depicted along with examples. At the end, future trends in MEMS are discussed.
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The author is grateful to Hadi Allameh for his careful reviewing of the manuscript and for providing helpful suggestions.
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Allameh, S.M. (2017). Mechanical Characterization of MEMS. In: Zhang, D., Wei, B. (eds) Advanced Mechatronics and MEMS Devices II. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-32180-6_7
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