Abstract
This chapter introduces photo-induced fabrication technologies for 3D MEMS devices. At first, we introduce principles of 3D photo-induced fabrication focusing on common aspects of photo-induced cross-linking and range of applicable materials. Then, we examine four technologies and their outcome of applications in detail where fabricated feature sizes decrease and resolution increases with progression of this chapter. (1) Microstereolithography enables a layer-by-layer fabrication of 3D devices, which find application in coaxial microfluidics and device fabrication in the presence of cells. (2) In situ photolithography is a 3D device fabrication with a pre-polymer solution inside microfluidic devices enabling fabrication of 3D structures inside microfluidic channels. (3) Flow lithography applies the concept of flowing pre-polymer material inside a microfluidic device in order to fabricate variously shaped microparticles for self-assembly or potential use as drug delivery systems. (4) Direct laser writing exposes focused laser light moved by computerized piezo actuation through pre-polymer medium enabling to structure with nanometer-sized feature sizes and constructing materials with special optical or mechanical properties as well as 3D devices for cell culture studies. The application of the achieved 3D devices ranges from microfluidic elements over bioMEMS devices constituting of analytical tools, cell culture conservation, and cell culture studies to biomedical application suitable for implants.
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References
Maruo S, Fourkas JT (2008) Recent progress in multiphoton microfabrication. Laser Photonics Rev 2:100–111
Vaezi M, Seitz H, Yang S (2013) A review on 3D micro-additive manufacturing technologies. Int J Adv Manuf Technol 67:1721–1754
Whitesides GM (2006) The origins and the future of microfluidics. Nature 442:368–373
Nakamaru Y, Honma H (2009) Fabrication of three-dimensional microstructure by nickel plating and photolithography. Trans Inst Met Finish 87:259–263
Larramendy F, Serien D, Yoshida S, Jalabert L, Takeuchi S, Paul O (2015) High-topography surface functionalization based on parylene-C peel-off for patterned cell growth. In: MEMS 2015 Proc., pp 328–331
Däschner W, Long P, Larsson M, Lee SH (1995) Fabrication of diffractive optical elements using a single optical exposure with a gray level mask. J Vac Sci Technol B 13:2729–2731
Hayashi T, Shibata T, Kawashima T, Makino E, Mineta T, Masuzawa T (2008) Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist. Sensors Actuators A 144:381–388
Miyake M, Chen Y-C, Braun PV, Wiltzius P (2009) Fabrication of three-dimensional photonic crystals using multibeam interference lithography and electrodeposition. Adv Mater 21:3012–3015
Suslik L, Pudis D, Skriniarova J, Martincek I, Kubicova I, Kovac J (2012) 2D photonic structures for optoelectronic devices prepared by interference lithography. Phys Procedia 32:807–813
Hirai Y, Inamoto Y, Sugano K, Tsuchiya T, Tabata O (2007) Moving mask UV lithography for three-dimensional structuring. J Micromech Microeng 17:199–206
Larramendy F, Mazenq L, Temple-Boyer P, Nicu L (2012) Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect. Lab Chip 12:387–390
Maruo S, Inoue H (2006) Optically driven micropump produced by three-dimensional two-photon microfabrication. Appl Phys Lett 89:144101
Morimoto Y, Tan W-H, Takeuchi S (2009) Three-dimensional axisymmetric flow-focusing device using stereolithography. Biomed Microdevices 11:369–377
Onoe H, Okitsu T, Itou A, Kato-Negishi M, Gojo R, Kiriya D, Sato K, Miura S, Iwanaga S, Kuribayashi-Shigetomi K, Matsunaga YT, Shimoyama Y, Takeuchi S (2013) Metre-long cell-laden microfibres exhibit tissue morphologies and functions. Nat Mater 12:584–590
Chung SE, Park W, Shin S, Lee SA, Kwon S (2008) Guided and fluidic self-assembly of microstructures using railed microfluidic channels. Nat Mater 7:581–587
Paulsen KS, Di Carlo D, Chung AJ (2015) Optofluidic fabrication for 3D-shaped particles. Nat Commun 6:6976
Di Carlo D (2009) Inertial microfluidics. Lab Chip 9:3038–3046
Sochol RD, Glick CC, Lee KY, Brubaker T, Lu A, Wah M, Gao S, Hicks E, Wolf KT, Iwai K, Lee LP, Lin L (2013) Single-layer “domino” diodes via optofluidic lithography for ultra-low reynolds number applications. In: MEMS 2013 Proc., pp 153–156
Moon B-U, Tsai SSH, Hwang DK (2015) Rotary polymer micromachines: in situ fabrication of microgear components in microchannels. Microfluid Nanofluid 19:67–74
Klein F, Richter B, Striebel T, Franz CM, vonFreymann G, Wegener M, Bastmeyer M (2011) Two-component polymer scaffolds for controlled three-dimensional cell culture. Adv Mater 23:1341–1345
Kim S, Qiu F, Kim S, Ghanbari A, Moon C, Zhang L, Nelson BJ, Choi H (2013) Fabrication and characterization of magnetic microrobots. Adv Mater 25:5863–5868
Kaehr B, Allen R, Javier DJ, Currie J, Shear JB (2004) Guiding neuronal development with in situ microfabrication. Proc Natl Acad Sci USA 101:16104–16108
Harper JC, Brozik SM, Brinker CJ, Kaehr B (2012) Biocompatible microfabrication of 3D isolation chambers for targeted confinement of individual cells and their progeny. Anal Chem 84:8985–8989
Rill MS, Plet C, Thiel M, Staude I, vonFreymann G, Linden S, Wegener M (2008) Photonic metamaterials by direct laser writing and silver chemical vapour deposition. Nat Mater 7:543–546
Bückmann T, Stender N, Kadic M, Kaschke J, Frölich A, Kennerknecht T, Eberl C, Thiel M, Wegener M (2012) Tailored 3D mechanical metamaterials made by dip-in direct-laser-writing optical lithography. Adv Mater 24:2710–2714
Bückmann T, Thiel M, Kadic M, Schittny R, Wegener M (2014) An elasto-mechanical unfeelability cloak made of pentamode metamaterials. Nat Commun 5:4130
Milton GW, Cherkaev AV (1995) Which elasticity tensors are realizable? J Eng Mater Technol 117:483–493
Kadic M, Bückmann T, Schittny R, Wegener M (2013) Metamaterials beyond electromagnetism. Rep Prog Phys 76:126501
Fischer J, Wegener M (2013) Three-dimensional optical laser lithography beyond the diffraction limit. Laser Photonics Rev 7:22–44
Coenjarts CA, Ober CK (2004) Two-photon three-dimensional microfabrication of poly(dimethylsiloxane) elastomers. Chem Mater 16:5556–5558
Bhawalkar JD, He GS, Prasad PN (1996) Nonlinear multiphoton processes in organic and polymeric materials. Rep Prog Phys 59:1041–1070
Lee K-S, Kim RH, Yang D-Y, Park SH (2008) Advances in 3D nano/microfabrication using two-photon initiated polymerization. Prog Polym Sci 33:631–681
Chan KF, Feng Z, Yang FR, Ishikawa A, Mei W (2003) High-resolution maskless lithography. J Microlith Microfab Microsyst 2:331–339
Jennes NJ, Hill RT, Hucknall A, Chilkoti A, Clark RL (2010) A versatile diffractive maskless lithography for single-shot and serial microfabrication. Opt Express 18:11754–11762
Nielson R, Kaehr B, Shear JB (2009) Microreplication and design of biological architectures using dynamic-mask multiphoton lithography. Small 5:120–125
Habasaki S, Lee WC, Yoshida S, Takeuchi S (2016) Vertical flow lithography for fabrication of 3D anisotropic particles. Small 11:6391–6396
Jennes NJ, Wulff KD, Johannes MS, Padgett MJ, Cole DG, Clark RL (2008) Three-dimensional parallel holographic micropatterning using a spatial light modulator. Opt Express 16:15942–15948
Lawson JL, Jenness N, Wilson S, Clark RL (2013) Method of creating microscale prototypes using SLM based holographic lithography. SPIE 8612(86120L):1–8
Bertsch A, Jézéquel JY, André JC (1997) Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique. J Photochem Photobiol A Chem 107:275–281
Ritschdorff ET, Nielson R, Shear JB (2012) Multi-focal multiphoton lithography. Lab Chip 12:867–871
Bertsch A, Bernhard P, Renaud P (2001) Microstereolithography: concepts and applications. In: Emerging technologies and factory automation proceedings, vol 2, pp 289–298
Tormen M, Businaro L, Altissimo M, Romanato F, Cabrini S, Perennes F, Proietti R, Sun H-B, Kawata S, DiFabrizio E (2004) 3D patterning by means of nanoimprinting, X-ray and two-photon lithography. Microelectron Eng 73–74:535–541
Wu C-Y, Owsley K, Di Carlo D (2015) Rapid software-based design and optical transient liquid molding of microparticles. Adv Mater 27:7970–7978
Quick AS, Fischer J, Richter B, Pauloehrl T, Trouillet V, Wegener M, Barner-Kowollik C (2013) Preparation of reactive three-dimensional microstructures via direct laser writing and thiol-ene chemistry. Macromol Rapid Commun 34:335–340
Choi J-W, MacDonald E, Wicker R (2010) Multi-material microstereolithography. Int J Adv Manuf Technol 49:543–551
Matsunaga YT, Morimoto Y, Takeuchi S (2010) Monodisperse cell-encapsulating peptide microgel beads for 3D cell culture. Langmuir 26:2645–2649
Farrer RA, LaFratta CN, Li L, Praino J, Naughton MJ, Saleh BEA, Teich MC, Fourkas JT (2006) Selective functionalization of 3-D polymer microstructures. J Am Chem Soc 128:1796–1797
Serbin J, Egbert A, Ostendorf A, Chichkov BN, Houbertz R, Domann G, Schulz J, Cronauer C, Fröhlich L, Popall M (2003) Femtosecond laser-induced two-photon polymerization of inorganic–organic hybrid materials for applications in photonics. Opt Lett 28:301–303
Richter B, Pauloehrl T, Kaschke J, Fichtner D, Fischer J, Greiner AM, Wedlich D, Wegener M, Delaittre G, Barner-Kowollik C, Bastmeyer M (2013) Three-dimensional microscaffolds exhibiting spatially resolved surface chemistry. Adv Mater 25:6117–6122
Scheiwe AC, Frank SC, Autenrieth TJ, Bastmeyer M, Wegener M (2015) Subcellular stretch-induced cytoskeletal response of single fibroblasts within 3D designer scaffolds. Biomaterials 44:186–194
Greiner AM, Klein F, Gudzenko T, Richter B, Striebel T, Wundari BG, Autenrieth TJ, Wegener M, Franz CM, Bastmeyer M (2015) Cell type-specific adaptation of cellular and nuclear volume in micro-engineered 3D environments. Biomaterials 69:121–132
Panda P, Ali S, Lo E, Chung BG, Hatton TA, Khademhosseini A, Doyle PS (2008) Stop-flow lithography to generate cell-laden microgel particles. Lab Chip 8:1056–1061
Hakimi N, Tsai SSH, Cheng C-H, Hwang DK (2014) One-step two-dimensional microfluidics-based synthesis of three-dimensional particles. Adv Mater 26:1393–1398
Chung SE, Park W, Park H, Yu K, Park N, Kwon S (2007) Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels. Appl Phys Lett 91:041106
Sochol RD, Heo YJ, Iwanaga S, Lei J, Wolf KT, Lu A, Kurihara M, Mori S, Serien D, Song L, Lin L, Takeuchi S (2013) Cells on arrays of microsprings: an approach to achieve triaxial control of substrate stiffness. In: MEMS 2013 Proc., pp 90–93
Morimoto Y, Mukouyama Y, Habasaki S, Takeuchi S (2016) Balloon Pump with Floating Valves for Portable Liquid Delivery. Micromachines 7:39
Mueller JB, Fischer J, Mayer F, Kadic M, Wegener M (2014) Polymerization kinetics in three-dimensional direct laser writing. Adv Mater 26:6566–6571
Xiong Z, Zheng M-L, Dong X-Z, Chen W-Q, Jin F, Zhao Z-S, Duan X-M (2011) Asymmetric microstructure of hydrogel: two-photon microfabrication and stimuli-responsive behavior. Soft Matter 7:10353–10359
Pitts JD, Campagnola PJ, Epling GA, Goodman SL (2000) Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release. Macromolecules 33:1514–1523
Kaehr B, Jason BS (2008) Multiphoton fabrication of chemically responsive protein hydrogels for microactuation. Proc Natl Acad Sci USA 105:8850–8854
Basu S, Campagnola PJ (2004) Enzymatic activity of alkaline phosphatase inside protein and polymer structures fabricated via multiphoton excitation. Biomacromolecules 5:572–579
Serien D, Takeuchi S (2015) Fabrication of submicron proteinaceous structures by direct laser writing. Appl Phys Lett 107:013702
Lee MR, Phang IY, Cui Y, Lee YH, Ling XY (2015) Shape-shifting 3D protein microstructures with programmable directionality via quantitative nanoscale stiffness modulation. Small 11:740–748
Sie YD, Li Y-C, Chang N-S, Campagnola PJ, Chen S-J (2015) Fabrication of three-dimensional multi-protein microstructures for cell migration and adhesion enhancement. Biomed Opt Express 6:480–490
Tanaka T, Ishikawa A, Kawata S (2006) Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure. Appl Phys Lett 88:081107
Spivey EC, Ritschdorff ET, Connell JL, McLennon CA, Schmidt CE, Shear JB (2013) Multiphoton lithography of unconstrained three-dimensional protein microstructures. Adv Funct Mater 23:333–339
Iosin M, Stephan O, Astilean S, Duperray A, Baldeck PL (2007) Microstructuration of protein matrices by laser-induced photochemistry. J Optoelectron Adv Mater 9:716–720
Sun Y-L, Dong W-F, Niu L-G, Jiang T, Liu D-X, Zhang L, Wang Y-S, Chen Q-D, Kim D-P, Sun H-B (2014) Protein-based soft micro-optics fabricated by femtosecond laser direct writing. Light Sci Appl 3, e129
Guo Q, Xiao S, Aumann A, Jaeger M, Chakif M’B, Ghadiri R, Esen C, Ma M, Ostendorf A (2012) Using laser microfabrication to write conductive polymer/SWNTs nanocomposites. J Laser Micro/Nanoeng 7:44–48
Lin C-Y, Hsu K-M, Huang H-C, Yeh T-F, Chang H-Y, Lien C-H, Teng H, Chen S-J (2015) Multiphoton fabrication of freeform polymer microstructures containing graphene oxide and reduced graphene oxide nanosheets. Opt Mater Express 5:218–226
Bakhtina NA, Voigt A, MacKinnon N, Ahrens G, Gruetzner G, Korvink JG (2015) Novel ionic liquid—polymer composite and an approach for its patterning by conventional photolithography. In: MEMS 2015 Proc., pp 97–101
Yu T, Ober CK, Kuebler SM, Zhou W, Marder SR, Perry JW (2003) Chemically amplified positive resists for two-photon three-dimensional microfabrication. Adv Mater 15:517–521
Maruo S, Nakamura O, Kawata S (1997) Three-dimensional microfabrication with two-photon-absorbed photopolymerization. Opt Lett 22:132–134
Fouassier JP, Morlet-Savary F, Lalevée J, Allonas X, Ley C (2010) Dyes as photoinitiators or photosensitizers of polymerization reactions. Materials 3:5130–5142
Oster G (1954) Dye-sensitized photopolymerization. Nature 173:300–301
Uppal N, Shiakolas PS (2008) Modeling of temperature-dependent diffusion and polymerization kinetics and their effects on two-photon polymerization dynamics. J Micro/Nanolithogr MEMS MOEMS 7:043002
Wang I, Bouriau M, Baldeck PL, Martineau C, Andraud C (2002) Three-dimensional microfabrication by two-photon-initiated polymerization with a low-cost microlaser. Opt Lett 27:1348–1350
Sun H-B, Tanaka T, Kawata S (2002) Three-dimensional focal spots related to two-photon excitation. Appl Phys Lett 80:3673–3675
Sun H-B, Takada K, Kim M-S, Lee K-S, Kawata S (2003) Scaling laws of voxels in two-photon photopolymerization nanofabrication. Appl Phys Lett 83:1104–1106
Lim TW, Park SH, Yang DY, Kong HJ, Lee KS (2006) Direct single-layered fabrication of 3D concavo–convex patterns in nano-stereolithography. Appl Phys A 84:379–383
Ikuta K, Hirowatari K (1993) Real three dimensional micro fabrication using stereo lithography and metal molding. In: MEMS’93 Proc., pp 42–47
Bertsch A, Sebastien J, Renaud P (2004) Microfabrication of ceramic components by microstereolithography. J Micromech Microeng 14:197–203
Kurihara M, Heo YJ, Kuribayashi-Shigetomi K, Takeuchi S (2012) 3D laser lithography combined with parylene coating for the rapid fabrication of 3D microstructures. In: MEMS 2012 Proc., pp 196–199
Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JE, Erskine LL, Heikal AA, Kuebler SM, Lee I-YS, McCord-Maughon D, Qin J, Roeckel H, Rumi M, Wu X-L, Marder SR, Perry JW (1999) Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature 398:51–54
Limaye AS, Rosen DW (2007) Process planning method for mask projection micro-stereolithography. Rapid Prototyp J 13:76–84
Ikuta K, Maruo S, Kojima S (1998) New micro stereolithography for freely movable 3D micro structure—SuperIH process with submicron resolution. In: MEMS’98 Proc., pp 290–295
Dendukuri D, Doyle PS (2009) The synthesis and assembly of polymeric microparticles using microfluidics. Adv Mater 21:4071–4086
Nisisako T, Ando T, Hatsuzawa T (2014) Capillary-assisted fabrication of biconcave polymeric microlenses from microfluidic ternary emulsion droplets. Small 10:5116–5125
Shepherd RF, Conrad JC, Rhodes SK, Link DR, Marquez M, Weitz DA, Lewis JA (2006) Microfluidic assembly of homogeneous and Janus colloid-filled hydrogel granules. Langmuir 22:8618–8622
Lee WC, Heo YJ, Takeuchi S (2012) Wall-less liquid pathways formed with 3-dimensional microring arrays. Appl Phys Lett 101:114108
Serien D, Takeuchi S (2015) Chemically responsive protein-photoresist hybrid actuator. In: MEMS 2015 Proc., pp 470–471
Lay CL, Lee MR, Lee HK, Phang IY, Ling XY (2015) Transformative two-dimensional array configurations by geometrical shape-shifting protein microstructures. ACS Nano 9:9708–9717
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Serien, D., Morimoto, Y., Takeuchi, S. (2017). Photo-Induced Fabrication Technology for 3D Microdevices. In: Zhang, D., Wei, B. (eds) Advanced Mechatronics and MEMS Devices II. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-32180-6_21
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