Abstract
An approach for design optimization of the geometrical parameters of silicon-on-insulator slot-waveguides for electro-optical modulators and biosensors is presented. Theoretical investigations of field confinement factors and effective nonlinear areas for different slot-waveguide structures are critically analyzed and thoroughly calculated. With our simulation results we explain the high efficiency of electro-optical modulators and the enhanced sensitivity of biosensors compared to strip-waveguides. The influence on the effective refractive index, field confinement factor, and effective nonlinear area of the slot width and the silicon rail width were investigated.
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Acknowledgements
The authors would like to thank the German Federal Ministry of Education and Research (BMBF) for the financial support under contract no. 03FH086PX2, the University of Applied Sciences Wildau (THWi), Germany, and the Ministry of Science, Technology and Culture of the federal state Brandenburg, Germany, for financial support. The authors would also like to thank P. Prosposito, F. De Matteis, and R. De Angelis from the University of Rome Tor Vergata, Italy, S. Meister, S. Kupijai, and A. Al-Saadi from the Technical University Berlin, Germany, and L. Zimmermann, D. Knoll, D. Stolarek, J. Katzer, S. Lischke, H. Silz, B. Tillack, and W. Mehr from the Institute of High-Performance Microelectronics (IHP), Germany, for their encouragement and support in the framework of the Joint-Lab IHP-THWi.
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Steglich, P., Villringer, C., Pulwer, S., Casalboni, M., Schrader, S. (2016). Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors. In: Ribeiro, P., Raposo, M. (eds) Photoptics 2015. Springer Proceedings in Physics, vol 181. Springer, Cham. https://doi.org/10.1007/978-3-319-30137-2_11
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