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BAW Piezoelectric Resonators

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Piezoelectric MEMS Resonators

Part of the book series: Microsystems and Nanosystems ((MICRONANO))

Abstract

This chapter describes basic properties and modeling of resonators using acoustic waves propagating in a solid body. This type of waves is called the bulk acoustic wave (BAW), which can be excited and detected efficiently using piezoelectricity. The resonators are widely used in various applications such as clock generation, frequency filtering, and sensing. The most popular ones are crystal quartz resonators [1] for relatively low frequency applications (<100 MHz). Recently BAW resonators fabricated by thin film and micromachining technologies, i.e., film bulk acoustic resonators (FBARs) [2], are getting popular for relatively high frequency applications (>1–3 GHz) such as duplexers used in mobile and smart phones.

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Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, Chiba, Chiba Prefecture, Japan

    Ken-ya Hashimoto

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  1. Ken-ya Hashimoto
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Correspondence to Ken-ya Hashimoto .

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Editors and Affiliations

  1. MEMS Division, Engineering Director, IDT Inc., San Jose, California, USA

    Harmeet Bhugra

  2. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA

    Gianluca Piazza

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Hashimoto, Ky. (2017). BAW Piezoelectric Resonators. In: Bhugra, H., Piazza, G. (eds) Piezoelectric MEMS Resonators. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-28688-4_8

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  • DOI: https://doi.org/10.1007/978-3-319-28688-4_8

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-28686-0

  • Online ISBN: 978-3-319-28688-4

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