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Piezoelectric MEMS Resonators pp 133–152Cite as

Quality Factor and Coupling in Piezoelectric MEMS Resonators

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Part of the book series: Microsystems and Nanosystems ((MICRONANO))

Abstract

A piezoelectric-based resonator is an electromechanical device in which electrical and mechanical energies are reciprocally converted to each other at a resonance frequency through the two-way coupling between stress and electric field in a piezoelectric material. Moreover, the mechanical energy in the resonator body and the applied electrical energy through the metallic electrodes convert from potential to kinetic and back in every vibration half cycle (Fig. 5.1). Therefore, the overall performance of a resonant system is determined by both of the energy conversion mechanisms mentioned above. To quantify the efficiency of these energy conversions in a resonator, there are two specific parameters defined as electromechanical coupling factor and quality factor (Q).

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Authors and Affiliations

  1. College of Engineering & Computer Science, University of Central Florida, 4000 Central Florida Blvd, Orlando, FL, 32816, USA

    Reza Abdolvand, Hedy Fatemi & Sina Moradian

Authors
  1. Reza Abdolvand
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  2. Hedy Fatemi
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  3. Sina Moradian
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Correspondence to Reza Abdolvand .

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Editors and Affiliations

  1. MEMS Division, Engineering Director, IDT Inc., San Jose, California, USA

    Harmeet Bhugra

  2. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA

    Gianluca Piazza

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Abdolvand, R., Fatemi, H., Moradian, S. (2017). Quality Factor and Coupling in Piezoelectric MEMS Resonators. In: Bhugra, H., Piazza, G. (eds) Piezoelectric MEMS Resonators. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-28688-4_5

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  • DOI: https://doi.org/10.1007/978-3-319-28688-4_5

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