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Lead Zirconate Titanate (PZT) for M/NEMS

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Book cover Piezoelectric MEMS Resonators

Part of the book series: Microsystems and Nanosystems ((MICRONANO))

Abstract

This section concentrates on the leading ferroelectric material used in thin-film piezoelectric MEMS: lead zirconate titanate (PbZr x Ti1−x O3) or PZT. PZT-based MEMS technology has been explored extensively for a variety of actuator applications [1] but has received less attention for RF MEMS resonator and filter applications. Despite the long and successful history of bulk PZT resonators [2], the process complexity/compatibility issues and high mechanical losses have discouraged the exploitation of this strong piezoelectric for these applications. However, for select MEMS resonator and filter applications, thin-film PZT offers many unique advantages due to the high electromechanical coupling factors, permittivity, piezoelectric stress constants, and the DC-bias electric field dependence of these properties. Significant progress has also been made in developing materials deposition and processing technologies that address the fabrication challenges with PZT thin films. The goals of this section include an analysis of the deposition of these materials, patterning techniques, identification of device design and processing concerns, and finally a detailed subsection covering examples of how PZT thin films have been incorporated into resonant-based devices.

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References

  1. Pulskamp J et al (2012) Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications. MRS Bull 37(11):1062–1070

    Article  Google Scholar 

  2. Fujishima S (2000) The history of ceramic filters. IEEE Trans UFFC 47(1):1–7

    Article  Google Scholar 

  3. Castellano RN, Feinstein LG (1979) Ion-beam deposition of thin films of ferroelectric PZT. J Appl Phys 50:4406–4411

    Article  Google Scholar 

  4. Krupanidhi SB et al (1983) RF planar magnetron sputtering and characterization of ferroelectric PZT films. J Appl Phys 54:6601–6609

    Article  Google Scholar 

  5. Okuyama M et al (1979) Preparation of PbTiO3 ferroelectric thin film by RF sputtering. Jpn J Appl Phys 18:1633–1634

    Article  Google Scholar 

  6. Sreenivas J, Sayer M, Garrett P (1989) Properties of dc magnetron-sputtered PZT thin films. Thin Solid Films 172:251–267

    Article  Google Scholar 

  7. Hiboux S, Muralt P, Setter N (2000) Orientation and composition dependence of piezoelectric dielectric properties of sputtered Pb(ZrxTi1-x)O3 thin films. Mat Res Soc Symp Proc 596:499–504

    Article  Google Scholar 

  8. Kanno I, Kotera H, Wasa K (2003) Measurement of transverse piezoelectric properties of PZT thin films. Sens Act A 107:68–74

    Article  Google Scholar 

  9. Okada M et al (1989) Preparation of c-axis oriented PbTiO3 thin films by MOCVD. Ferroelectrics 91:181–192

    Article  Google Scholar 

  10. Kuwabara H, Menou N, Funakubo H (2008) 1 V saturated Pb(Zr, Ti)O3 films with (111) orientation using lattice-matched (111) SrRuO3/(111) Pt bottom electrode prepared by pulsed metal organic chemical vapor deposition. Appl Phys Lett 93:152901-1–152901-3

    Google Scholar 

  11. Otani Y, Okamura S, Shiosaki T (2004) Recent developments on MOCVD of ferroelectric thin films. J Electroceram 13:15–22

    Article  Google Scholar 

  12. Budd KD, Dey SK, Payne DA (1985) Sol-gel processing of PT, PZ, PZT, and PLZT thin films. Br Ceram Proc 36:107

    Google Scholar 

  13. Spierings GAMC et al (1991) Preparation and ferroelectric properties of PZT by spin coating and metal organic decomposition. J Appl Phys 70:2290–2298

    Article  Google Scholar 

  14. Tuttle BA et al (1992) Microstructural evolution of PZT thin films prepared by hybrid metallorganic decomposition. J Mater Res 7:1876–1882

    Article  Google Scholar 

  15. Tuttleand BA, Schwartz RW (1996) Solution deposition of PZT ferroelectric thin films prepared by hybrid metallorganic decomposition. MRS Bull 7:1876–1882

    Google Scholar 

  16. Schwartz JW (1997) Chemical solution deposition of perovskite thin films. Chem Mater Sci 209:2325–2340

    Article  Google Scholar 

  17. Calame F, Muralt P (2007) Growth and properties of gradient free sol-gel lead zirconate titanate thin films. App Phys Lett 90:062907

    Article  Google Scholar 

  18. Klissurska RD et al (1995) Effect of Nb doping on the microstructure of sol-gel derived PZT thin films. J Am Ceram Soc 78:1513–1520

    Article  Google Scholar 

  19. Muralt P, Baborowski J, Lederman N (2002) Piezoelectric micro-electro-mechanical systems with PbZrxTi1-xO3 thin films: integration and application issues, piezoelectric materials and devices, EPFL Swiss Federal Institute of Technology, Switzerland, pp 231–260

    Google Scholar 

  20. Hartl KH, Rau H (1969) PbO vapour pressure in the Pb(Zr, Ti)O3 system. Solid State Commun 7:41–45

    Article  Google Scholar 

  21. Muralt P (2006) Texture control and seeded nucleation of nanosize structures of ferroelectric thin films. J Appl Phys 100:051605

    Article  Google Scholar 

  22. Trolier-McKinstry S, Muralt P (2004) Thin film piezoelectrics for MEMS. J Electroceram 12:7–17

    Article  Google Scholar 

  23. Kim DM, Eom CB, Nagarajan V, Ouyang J, Ramesh R, Vaithyanathan V, Schlom DG (2006) Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr0.52Ti0.48)O3 films on Si and SrTiO3 substrates. Appl Phys Lett 88:142904-1–142904-3

    Google Scholar 

  24. Fox G, Suu K (2004) High temperature deposition of Pt/TiOx for bottom electrodes, US Patent 6,682,772

    Google Scholar 

  25. Nakamura T, Nakao Y, Kamisawa A, Takasu H (1994) Preparation of Pb(Zr, Ti)O3 thin films on electrodes including IrO2. Appl Phys Lett 65:1522

    Article  Google Scholar 

  26. Fox GR, Sun S, Eastep B, Hadnagy TD (1999) Comparison of CSD and sputtered PZT with iridium electrodes. Integr Ferroelectr 26:215–223

    Article  Google Scholar 

  27. Whatmore RW, Zhang Q, Huang Z, Dorey RA (2003) Ferroelectric thin and thick films for microsystems. Mater Sci Semi Proc 5:65–76

    Article  Google Scholar 

  28. Schwartz RW, Assink RA, Headley TJ (1992) Spectroscopic and microstructural characterization of solution chemistry effects in PZT thin film processing. Ferroelectric Thin Films II Mat Res Soc Symp Proc 243:245–254

    Article  Google Scholar 

  29. Assink RA, Schwartz RW (1993) 1H and 13C NMR investigations of Pb(Zr, Ti)03 thin-film precursor solutions. Chem Mater 5:511–517

    Article  Google Scholar 

  30. http://www.mmc.co.jp/adv/ele/en/products/assembly/solgel.html

  31. Zhou QF, Hong E, Wolf R, Trolier-McKinstry S (2001) Dielectric and piezoelectric properties of PZT 52/48 thick films with (100) and random crystallrographic orientation. Ferroelectric Thin Films IX Mater Res Soc Proc 655:CC11.7.1–CC11.7.6

    Google Scholar 

  32. Ledermann N, Muralt P et al (2003) {100}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties. Sens Act A 105:162–170

    Article  Google Scholar 

  33. Orcel G, Hench L (1986) Effect of formamide additive on the chemistry of silica-gels. Part 1. NMR of silica hydrolysis. J Non-Cryst Solids 79:177–194

    Article  Google Scholar 

  34. Schwartz RW, Assink RA, Dimos D, Sinclair MB, Boyle TJ, Buchheit CD (1995) Effects of acetylacetone additions on PZT thin film processing. Ferroelectric Thin Films IV MRS Symp 377–387

    Google Scholar 

  35. Sanchez L, Potrepka D, Fox G, Takeuchi I, Polcawich RG (2013) Optimization of PbTiO3 seed layers and Pt metallization for PZT based PiezoMEMS actuators. J Mater Res 28:1920–1931

    Article  Google Scholar 

  36. Shelton CT et al (2012) Chemically homogeneous complex oxide thin films via improved substrate metallization. Adv Funct Mater 22:2295–2302

    Article  Google Scholar 

  37. Ihlefeld J, Shelton C (2012) Chemical homogeneity effects on the nonlinear dielectric response of lead zirconate titanate thin films. Appl Phys Lett 101:052902

    Article  Google Scholar 

  38. Mancha S (1992) Chemical etching of thin film PLZT. Ferroelectrics 135:131–137

    Article  Google Scholar 

  39. Miller R, Bernstein J (2000) A novel wet etch for patterning PZT thin films. Integr Ferroelectr 29:225–231

    Article  Google Scholar 

  40. Zheng K, Lu J, Chu J (2004) A novel wet etching process of Pb(Zr, Ti)O3 thin films for applications in microelectromechanical system. J Appl Phys 43:3934–3937

    Article  Google Scholar 

  41. Vijay DP, Desu SUB, Pan W (1993) Reactive ion etching of lead zirconate titanate (PZT) thin film capacitors. J Electrochem Soc 140:2535–2539

    Google Scholar 

  42. Pan W et al (1994) Reactive ion etching of PZT and RuO2 films by environmentally safe gases. J Mater Res 9:2976–2980

    Article  Google Scholar 

  43. Baborowski J et al (2001) Mechanisms of PZT thin film etching with ECR/RF reactor. Int Ferroelectr 31:261–271

    Article  Google Scholar 

  44. Joo SH, Lee JJ et al (2001) Stacked FRAM capacitor etching process for high density application. Integr Ferroelectr 37:103–111

    Article  Google Scholar 

  45. Chung CW (1998) Reactive ion etching of Pb(ZrxTi1-x)O3 thin films in an inductively coupled plasma. J Vac Sci Tech B 16:1894–1900

    Article  Google Scholar 

  46. Koo S, Kim D, Kim K, Song S, Kim C (2004) Etching properties of Pb(ZrxTi1-x)O3lead–zirconate–titanate thin films in an inductively coupled plasma Cl2/Ar and BCl3 /Ar gas chemistries. J Vac Sci Tech B Technol A 1622:1519–1523

    Article  Google Scholar 

  47. Baborowski J, Muralt P, Lederman N (1999) Etching of platinum thin films with dual frequency ECR/RF reactor. Integ Ferroelectr 27:243–256

    Article  Google Scholar 

  48. Baborowski J et al (2000) Etching of RuO2 and Pt with ECR/RF reactor. Vacuum 56:51–56

    Article  Google Scholar 

  49. Chung CW, Chung I (2001) Etch behavior of Pb(ZrxTi1-X)O3 films using a TiO2 hard. J Electrochem Soc 148:C353–C356

    Article  Google Scholar 

  50. Joo SH, Lee JJ, Lee KM, Nam SD, Lee SW, Oh SJ, Lee YT, Park SO, Kang HK, Moon JT (2001) Stacked FRAM capacitor etching process for high density application. Integr Ferro 31:103–111

    Article  Google Scholar 

  51. Soyer C, Cattan E, Rémiens D, Guilloux-Viry M (2002) Ion beam etching of lead–zirconate–titanate thin films: correlation between etching parameters and electrical properties evolution. J Appl Phys 92:1048–1055

    Article  Google Scholar 

  52. Soyer C, Cattan E, Rémiens D (2005) Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films. J Appl Phys 97:114110–114117

    Article  Google Scholar 

  53. Udayakumar KR, Moise TS, Summerfelt SR (2007) Ferroelectric capacitor hydrogren barriers and methods for fabricating the same. US Patent No. 7,183,602

    Google Scholar 

  54. Yang J, Polcawich RG, Sanchez LM et al (2015) Effect of feature size on dielectric nonlinearity of patterned PbZr0.52Ti0.48O3 films. J Appl Phys 117:014103

    Article  Google Scholar 

  55. Polcawich RG, Trolier-McKinstry S (2000) Piezoelectric and dielectric reliability of lead zirconate titanate (PZT) thin films. J Mater Res 15(11):2505–2513

    Article  Google Scholar 

  56. Pulskamp J et al (2016) Ferroelectric PZT MEMS HF/VHF resonators/filters. Frequency Control and the European Frequency and Time Forum (FCS). Joint Conf IEEE Int

    Google Scholar 

  57. Rudy RQ et al (2016) Disk Flexure resonator with 1 dB insertion loss. Frequency control and the European Frequency and Time Forum (FCS). Joint Conf IEEE Int

    Google Scholar 

  58. Rudy RQ et al (2016) Low-loss gold-laced PZT-on-silicon resonator with reduced parasitics. 2016 IEEE 29th international conference on micro electro mechanical systems (MEMS)

    Google Scholar 

  59. Bedair S, Pulskamp J, Polcawich R, Judy D, Gillon A, Bhave S, Morgan B (2012) Low loss micromachined lead zirconate titanate, contour mode resonator with 50 ω termination. MEMS 2012, Paris, France, pp 708–712. Accessed 29 Jan–2 Feb 2012

    Google Scholar 

  60. Yagubizade H et al (2013) A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators. Appl Phys Lett 103(17):173517

    Article  Google Scholar 

  61. Chandrahalim H et al (2010) PZT transduction of high-overtone contour-mode resonators. Ultrason Ferroelectrics Freq Contr IEEE Trans 57(9):2035–2041

    Article  Google Scholar 

  62. Conde J, Muralt P (2008) Characterization of sol-gel Pb (Zr 0.53 Ti 0.47) O 3 in thin film bulk acoustic resonators. Ultrason Ferroelectr Freq Contr IEEE Trans 55(6):1373–1379

    Article  Google Scholar 

  63. Chandrahalim H et al (2008) Influence of silicon on quality factor, motional impedance, and tuning range of PZT-transduced resonators. 2008 Solid State sensor, actuator and microsystems workshop

    Google Scholar 

  64. Wasa K et al (2008) Thin films of PZT-based ternary perovskite compounds for MEMS. Ultrason Symp IUS 2008 IEEE

    Google Scholar 

  65. Chandrahalim H, Bhave S, Polcawich R, Pulskamp J, Judy D, Kaul R (2008) Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators. Appl Phys Lett 93

    Google Scholar 

  66. Schreiter M et al (2004) Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators. J Eur Ceram Soc 24(6):1589–1592

    Article  Google Scholar 

  67. Larson JD, III, Gilbert SR, Xu B (2004) PZT material properties at UHF and microwave frequencies derived from FBAR measurements. Ultrason Symp 2004 IEEE 1

    Google Scholar 

  68. Kirby PB et al (2001) PZT thin film bulk acoustic wave resonators and filters. 2001 IEEE international frequency control symposium and PDA exhibition, vol 687

    Google Scholar 

  69. Qing-Xin S et al (2001) Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films. Microw Theor Tech IEEE Trans 49(4):769–778

    Article  Google Scholar 

  70. Löbl HP et al (2001) Materials for bulk acoustic wave (BAW) resonators and filters. J Eur Ceram Soc 21(15):2633–2640

    Article  Google Scholar 

  71. Hanajima N et al (1997) Ultrasonic properties of lead zirconate titanate thin films in UHF-SHF range. Jpn J Appl Phys 36(9S):6069

    Article  Google Scholar 

  72. Aigner R (2003) MEMS in RF filter applications: thin‐film bulk acoustic wave technology. Sens Update 12(1):175–210

    Article  Google Scholar 

  73. Piekarski B et al (2001) Surface micromachined piezoelectric resonant beam filters. Sens Actuator A Phys 91(3):313–320

    Article  Google Scholar 

  74. [Online]. www.piceramic.com/download/PI_Ceramic_Material_Data.pdf

  75. Yagnamurthy S et al (2011) Mechanical and ferroelectric behavior of PZT-based thin films. Microelectromech Syst J 20(6):1250–1258

    Article  Google Scholar 

  76. Aigner R (2015) Tunable filters? Reality check foreseeable trends in system architecture for tunable RF filters. Microw Mag IEEE 16(7):82–88

    Article  Google Scholar 

  77. Polcawich R, Pulskamp J (2011) Additive processes for piezoelectric materials: piezoelectric MEMS. In: Ghodssi R, Lin P (eds) MEMS materials and processes handbook, 1st edn. Springer, New York, pp 273–344

    Chapter  Google Scholar 

  78. Bedair S et al (2013) Thin-film piezoelectric-on-silicon resonant transformers. J Microelectromech Syst 22(6):1383–1394

    Article  Google Scholar 

  79. Bedair S, Pulskamp J, Polcawich R, Rudy R, Puder J (2015) Thin-film piezoelectric transformers operating in harmonics of out-of-plane flexure modes. In: Solid-state sensors, actuators and microsystems, transducers-2015 18th international conference on IEEE, pp 714–717

    Google Scholar 

  80. Pulskamp J, Bedair S, Polcawich R, Judy D, Bhave S (2011) Ferroelectric PZT RF MEMS resonators. IEEE Frequency Control Symposium, San Francisco, CA, pp 1–6

    Google Scholar 

  81. Puder J et al (2015) Higher dimensional flexure mode for enhanced effective electromechanical coupling in PZT-on-silicon MEMS resonators. Solid-state sensors, actuators and microsystems (TRANSDUCERS), 2015 transducers-2015 18th international conference on IEEE

    Google Scholar 

  82. Pulskamp J, Bedair S, Polcawich R, Smith G, Martin J, Power B, Bhave S (2012) Electrode-shaping for the excitation and detection of arbitrary modes in arbitrary geometries in piezoelectric resonators. IEEE Trans Ultrason Ferro Freq Control 59:1043–1060

    Article  Google Scholar 

  83. Bedair S, Judy D, Pulskamp J, Polcawich RG, Gillon A, Hwang E, Bhave S (2011) High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators. App Phys Lett 99:103509

    Article  Google Scholar 

  84. Kaul R et al (2014) A bi-phase MEMS resonator modulator. IEEE Microw Wirel Compon Lett 24(1):41–43

    Article  MathSciNet  Google Scholar 

  85. Kim B, Olsson RH, Wojciechowski KE (2013) AlN microresonator-based filters with multiple bandwidths at low intermediate frequencies. J Microelectromech Syst 22(4):949–961

    Article  Google Scholar 

  86. Pulskamp J, Judy D, Kaul R, Polcawich R, Chandrahalim H, Bhave S (2009) Monolithically integrated piezo-MEMS SP2T switch and contour-mode filters. IEEE MEMS Trans 900–903

    Google Scholar 

  87. Pulskamp J, Bedair S, Polcawich R, Meyer C, Kierzewski I, Maack B (2014) High-Q and capacitance ratio multilayer metal-on-piezoelectric RF MEMS varactors. IEEE Electron Device Lett 35:871–873

    Article  Google Scholar 

  88. Bedair S, Pulskamp J, Meyer C, Polcawich R, Kierzewski I (2014) Modeling, fabrication and testing of MEMS tunable inductors varied with piezoelectric actuators. J Micromech Microeng 24:095017, 12 pp

    Article  Google Scholar 

  89. Bedair S, Pulskamp J, Meyer C, Mirabelli M, Polcawich R, Morgan B (2012) High-performance, micromachined inductors tunable by lead zirconate titanate actuators. IEEE Electron Dev Lett 33:1–3

    Article  Google Scholar 

  90. Damjanovic D (1998) Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics. Rep Prog Phys 61(9):1267

    Article  Google Scholar 

  91. Chandrahalim H, Bhave S, Polcawich R, Pulskamp J, Judy D, Kaul R (2009) A Pb(Zr0.52Ti0.48)O3 transduced fully-differential mechanical-coupled frequency-agile filter. IEEE Electron Device Lett 30(12):1296–1298

    Article  Google Scholar 

  92. Zuo C, Sinha N, Piazza G (2010) Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators. Sens Actuator A Phys 160(1):132–140

    Article  Google Scholar 

  93. [Online]. http://www.digikey.com/product-search/en/filter

  94. Fujii T et al (2010) Characterization of Nb-doped Pb (Zr, Ti) O 3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications. Sens Actuator A: Phys 163(1):220–225

    Article  Google Scholar 

  95. Fujii T et al (2009) Preparation of Nb doped PZT film by RF sputtering. Solid State Commun 149(41):1799–1802

    Article  Google Scholar 

  96. Benhadjala W et al (2015) Sol-gel doped-PZT thin films for integrated tunable capacitors. International symposium on microelectronics, vol 2015. No. 1. International Microelectronics Assembly and Packaging Society

    Google Scholar 

  97. Wasa K et al (2013) PZT-based high coupling with low permittivity thin films. Applications of ferroelectric and workshop on the piezoresponse force microscopy (ISAF/PFM), 2013 IEEE international symposium on the IEEE

    Google Scholar 

  98. Baborowski J, Muralt P, Ledermann N, Colla E, Seifert A, Gentil S, Setter N (2000) Mechanisms of Pb(Zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor. Integr Ferroelectr 31:261–271

    Article  Google Scholar 

  99. Fujii T et~al. Fuji Research and Development, No. 59-2014

    Google Scholar 

  100. Tsuchiya K, Kitagawa T, Uetsuji Y, Nakamachi E (2006) Fabrication of smart material PZT thin films by RF magnetron sputtering method in micro actuators. JSME Intern J 49:201–208

    Article  Google Scholar 

  101. Polcawich RG (2007) Design, fabrication, test, and evaluation of RF MEMS series switches using lead zirconate titanate (PZT) thin film actuators, Ph.D. Thesis, Pennsylvania State University

    Google Scholar 

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Acknowledgment

The authors would like to thank Dr. Brett Piekarski and Dr. Paul Amirtharaj of the US Army Research Laboratory for their support and encouragement in writing this chapter. The authors also acknowledge the effort of their colleagues Dr. Sarah Bedair, Dr. Madan Dubey, Dr. Ryan Rudy, Dr. Daniel Potrepka, Dr. Luz Sanchez, Joel Martin, and Brian Power of the US Army Research Laboratory, Steven Isaacson of General Technical Services, and Dr. Glen Fox of Glen Fox Consulting in assisting with this chapter.

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  1. US Army Research Laboratory, RDRL-SER-L, 2800 Powder Mill Road, Adelphi, MD, 20783, USA

    Ronald G. Polcawich & Jeffrey S. Pulskamp

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  1. Ronald G. Polcawich
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Correspondence to Ronald G. Polcawich .

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  1. MEMS Division, Engineering Director, IDT Inc., San Jose, California, USA

    Harmeet Bhugra

  2. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA

    Gianluca Piazza

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Polcawich, R.G., Pulskamp, J.S. (2017). Lead Zirconate Titanate (PZT) for M/NEMS. In: Bhugra, H., Piazza, G. (eds) Piezoelectric MEMS Resonators. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-28688-4_2

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