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Computational Modeling Challenges

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Piezoelectric MEMS Resonators

Part of the book series: Microsystems and Nanosystems ((MICRONANO))

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Abstract

Accurate modeling of piezoelectric MEMS Resonators is key to reducing fabrication cycles or diagnosing issues with fabricated devices. Analytic models provide a first pass at assessing device performance but are idealized and do not represent actual device performance to sufficient accuracy, especially for the high-order bulk modes utilized in MEMS oscillators and filters. Computational modeling by the finite-element method has taken great strides in capturing greater detail in both geometry and physical behavior of these resonators. While continuing improvements in computational power have aided in this progress, it is the advances in both algorithms and methodology in coupling physical domains that have enabled greater accuracy compared to fabricated devices. In this chapter we review the key challenge areas in resonator design for which advances in computational modeling provide predictive value.

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Acknowledgements

The author would like to thank Stuart Traux for the description of fluid damping at high frequency and the helpful review of this text, Rahul Jhaveri for many of the simulations contained here, and Professor Songbin Gong for the many discussions on the topics contained here.

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Authors and Affiliations

  1. Coventor, Inc, Waltham, MA, USA

    Mattan Kamon Ph.D.

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  1. Mattan Kamon Ph.D.
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Correspondence to Mattan Kamon Ph.D. .

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Editors and Affiliations

  1. MEMS Division, Engineering Director, IDT Inc., San Jose, California, USA

    Harmeet Bhugra

  2. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA

    Gianluca Piazza

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Kamon, M. (2017). Computational Modeling Challenges. In: Bhugra, H., Piazza, G. (eds) Piezoelectric MEMS Resonators. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-28688-4_11

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  • DOI: https://doi.org/10.1007/978-3-319-28688-4_11

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-28686-0

  • Online ISBN: 978-3-319-28688-4

  • eBook Packages: EngineeringEngineering (R0)

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