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Low-Dimensional and Nanostructured Materials and Devices pp 105–130Cite as

The Challenge to Develop Metrology at the Nanoscale

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Part of the book series: NanoScience and Technology ((NANO))

Abstract

Since nanotechnology goods are manufactured and utilised by the community, legal metrology, human safety, and the environment demand traceable measurement techniques. This is the business of the international network of measurements called metrology. After 2017 the realisation of the international metre will be through the lattice parameter of silicon or another suitable crystalline material. Many NMI’s have developed traceable instrumentation systems primarily for AFM, but only partly for SEM and optical instrumentation. None of the existing techniques is able to meet the present requirements for reliable metrology of nanomaterials. However suitable reference materials are being developed alongside standardised sample preparation methods. Present second generation nanostructures are complex requiring multiparameter and ensemble measurements that AFM or SEM cannot offer. Ensemble techniques reveal the sub-nanometre detail required in the healthcare and electronics industry. The next generation of manufacturing in these industries will be three-dimensional complex sub-nm architectures, and nanometrology is currently being driven there.

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Acknowledgments

I would like to thank Seda Aytekin for her assistance in finding the relevant references.

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  1. Department of Physics, Yeditepe University, Kayisdagi Caddessi, Kadikoy, 34755, Istanbul, Turkey

    R. Ince

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  1. R. Ince
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Correspondence to R. Ince .

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Editors and Affiliations

  1. Department of Physics Engineering, Faculty of Science and Letters,, Istanbul Technical University, Istanbul, Türkiye

    Hilmi Ünlü

  2. Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, NJ, USA

    Norman J. M. Horing

  3. Leibniz-Inst. für innovative Mikroelektr, Innovations for High Performance Microelectronics (IHP) GmbH, Frankfurt, Germany

    Jaroslaw Dabrowski

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Ince, R. (2016). The Challenge to Develop Metrology at the Nanoscale. In: Ünlü, H., Horing, N.J.M., Dabrowski, J. (eds) Low-Dimensional and Nanostructured Materials and Devices. NanoScience and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-25340-4_4

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