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Part of the book series: SpringerBriefs in Materials ((BRIEFSMATERIALS))

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Abstract

This chapter provides an overview of the coating and functionalization of nanostructured substrates and high surface area materials using vapor phase deposition techniques. The main thin film growth techniques, types of substrates, and the fundamental concepts involving the reactive transport inside nanostructures are introduced. Finally, we provide a short historical overview focusing on key application domains, including semiconductor processing, chemical vapor infiltration, and catalysis.

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Correspondence to Angel Yanguas-Gil .

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Yanguas-Gil, A. (2017). Introduction. In: Growth and Transport in Nanostructured Materials. SpringerBriefs in Materials. Springer, Cham. https://doi.org/10.1007/978-3-319-24672-7_1

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