Skip to main content
SpringerLink
Log in

Vapor Phase Epitaxy of AlGaN Base Layers on Sapphire Substrates for Nitride-Based UV-Light Emitters

  • Chapter
  • First Online:
III-Nitride Ultraviolet Emitters

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 227))

Abstract

UV transparent lattice matched substrates, e.g., AlN and AlGaN, with low dislocation densities are required for the epitaxial growth of UV-LED structures. In the absence of inexpensive high-quality UV transparent AlN bulk substrates, the heteroepitaxial growth of AlN base layers on relatively cheap and readily available sapphire substrates is the commonly used approach for most UV-B and UV-C LEDs. This chapter provides an insight into growth, strain management, and dislocation reduction techniques in metalorganic vapor phase epitaxy (MOVPE) of AlN and hydride vapor phase epitaxy (HVPE) of AlGaN layers. For both MOVPE and HVPE epitaxial lateral overgrowth of patterned substrate surfaces is an important technique to enhance the thickness of crack-free layers. This opens the route to UV-LEDs with improved performance.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 99.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 129.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 179.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. F. Mehnke, T. Wernicke, H. Pingel, C. Kuhn, C. Reich, V. Kueller, A. Knauer, M. Lapeyrade, M. Weyers, M. Kneissl, Appl. Phys. Lett. 103(21), 212109 (2013)

    Article  Google Scholar 

  2. M. Kneissl, T. Kolbe, C. Chua, V. Kueller, N. Lobo, J. Stellmach, A. Knauer, H. Rodriguez, S. Einfeldt, Z. Yang, N.M. Johnson, M. Weyers, Semicond. Sci. Technol. 26, 014036 (2011)

    Article  Google Scholar 

  3. H. Hirayama, S. Fujikawa, N. Noguchi, J. Norimatsu, T. Takano, K. Tsubaki, N. Kamata, Phys. Status Solidi A 206(6), 1176 (2009)

    Article  Google Scholar 

  4. J. Rass, T. Kolbe, N. Lobo-Ploch, T. Wernicke, F. Mehnke, C. Kuhn, J. Enslin, M. Guttmann, C. Reich, A. Mogilatenko, J. Glaab, C. Stoelmacker, M. Lapeyrade, S. Einfeldt, M. Weyers, M. Kneissl, Proc. SPIE 9363, 93631K (2015)

    Article  Google Scholar 

  5. J.E. Ayers, Heteroepitaxy of Semiconductors: Theory, Growth, and Characterization (Taylor & Francis Group LCC, 2007)

    Google Scholar 

  6. O. Klein, J. Biskupek, K. Forghani, F. Scholz, U. Kaiser, J. Cryst. Growth 324, 63 (2011)

    Article  Google Scholar 

  7. C.J. Sun, P. Kung, A. Saxler, H. Ohsato, K. Haritos, M. Razeghi, J. Appl. Phys. 75(8), 3964 (1994)

    Article  Google Scholar 

  8. F.A. Ponce, J.S. Major, W.E. Plano, D.F. Welch, Appl. Phys. Lett. 65(18), 2302 (1994)

    Article  Google Scholar 

  9. H. Amano, N. Sawaki, I. Akasaki, Y. Toyoda, Appl. Phys. Lett. 48(5), 353 (1986)

    Article  Google Scholar 

  10. H. Amano, I. Akasaki, K. Hiramatsu, N. Koide, N. Sawaki, Thin Solid Films 163, 415 (1988)

    Article  Google Scholar 

  11. H. Hirayama, T. Yatabe, N. Noguchi, T. Ohashi, N. Kamata, Appl. Phys. Lett. 91(7), 071901 (2007)

    Article  Google Scholar 

  12. Ferdinand-Braun-Institut Berlin (unpublished)

    Google Scholar 

  13. Y. Hayashi, R.G. Banal, M. Funato, Y. Kawakami, J. Appl. Phys. 113(18), 183523 (2013)

    Article  Google Scholar 

  14. K. Ueno, J. Ohta, H. Fujioka, H. Fukuyama, Appl. Phys. Express 4(1), 015501 (2011)

    Article  Google Scholar 

  15. K. Kawaguchi, A. Kuramata, Jpn. J. Appl. Phys. 44(11L), L1400 (2005)

    Article  Google Scholar 

  16. O. Reentilä, F. Brunner, A. Knauer, A. Mogilatenko, W. Neumann, H. Protzmann, M. Heuken, M. Kneissl, M. Weyers, G. Tränkle, J. Cryst. Growth 310(23), 4932 (2008)

    Article  Google Scholar 

  17. H. Li, T.C. Sadler, P.J. Parbrook, J. Cryst. Growth 383, 72 (2013)

    Article  Google Scholar 

  18. Q.S. Paduano, D.W. Weyburne, J. Jasinski, Z. Liliental-Weber, J. Cryst. Growth 261, 259 (2004)

    Article  Google Scholar 

  19. V. Kueller, A. Knauer, F. Brunner, A. Mogilatenko, M. Kneissl, M. Weyers, Phys. Status Solidi C 9, 496 (2012)

    Article  Google Scholar 

  20. A. Knauer, F. Brunner, T. Kolbe, V. Kueller, H. Rodrigues, S. Einfeldt, M. Weyers, Kneissl. Proc. SPIE 7231, 72310G (2009)

    Article  Google Scholar 

  21. N.A. Fleck, M.F. Ashby, J.W. Hutchinson, Scripta Mater. 48, 179 (2003)

    Article  Google Scholar 

  22. M. Iwaya, S. Terao, T. Sano, S. Takanami, T. Ukai, R. Nakamura, S. Kamiyama, H. Amano, I. Akasaki, Phys. Status Solidi A 188(1), 117 (2001)

    Article  Google Scholar 

  23. H. Amano, K. Nagamatsu, K. Takeda, T. Mori, H. Tsuzuki, M. Iwaya, S. Kamiyama, I. Akasaki, Proc. SPIE 7216, 72161B (2009)

    Article  Google Scholar 

  24. M.A. Moram, M.E. Vickers, Rep. Progr. Phys. 72, 036502 (2009)

    Article  Google Scholar 

  25. T. Wunderer, C.L. Chua, Z. Yang, J.E. Northrup, N.M. Johnson, G.A. Garrett, H. Shen, M. Wraback, Appl. Phys. Express 4(9), 092101 (2011)

    Article  Google Scholar 

  26. P. Vennéguès, B. Beaumont, S. Haffouz, M. Vaille, P. Gibart, J. Cryst. Growth 187(2), 167 (1998)

    Article  Google Scholar 

  27. K. Forghani, M. Klein, F. Lipski, S. Schwaiger, J. Hertkorn, R.A.R. Leute, F. Scholz, B. Feneberg, M. Neuschl, K. Thonke, O. Klein, U. Kaiser, R. Gutt, T. Passow, J. Cryst. Growth 315, 216 (2011)

    Article  Google Scholar 

  28. A. Krost, J. Bläsing, F. Schulze, O. Schön, A. Alam, M. Heuken, J. Cryst. Growth 221, 251 (2000)

    Article  Google Scholar 

  29. M. Iwaya, S. Terao, N. Hayashi, T. Kashima, H. Amano, I. Akasaki, Appl. Surf. Sci. 159160, 405 (2000)

    Article  Google Scholar 

  30. H. Tsuzuki, F. Mori, K. Takeda, M. Iwaya, S. Kamiyama, H. Amano, I. Akasaki, H. Yoshida, M. Kuwabara, Y. Yamashita, H. Kan, J. Cryst. Growth 311, 2860 (2009)

    Article  Google Scholar 

  31. A.A. Allerman, M.H. Crawford, S.R. Lee, B.G. Clark, J. Cryst. Growth 388, 76 (2014)

    Article  Google Scholar 

  32. K. Iida, T. Kawashima, M. Iwaya, S. Kamiyama, H. Amano, I. Akasaki, A. Bandoh, J. Cryst. Growth 298, 265 (2006)

    Article  Google Scholar 

  33. H.M. Wang, J.P. Zhang, C.Q. Chen, Q. Fareed, J.W. Yang, M.A. Khan, Appl. Phys. Lett. 81(4), 604 (2002)

    Article  Google Scholar 

  34. J.R. Grandusky, J. Chen, S.R. Gibb, M.C. Mendrick, C.G. Moe, L. Rodak, G.A. Garrett, M. Wraback, L.J. Schowalter, Appl. Phys. Express 6(3), 032101 (2013)

    Article  Google Scholar 

  35. H. Hirayama, T. Yatabe, N. Noguchi, T. Ohashi, N. Kamata, Phys. Status Solidi C 5(9), 2969 (2008)

    Article  Google Scholar 

  36. K. Nakano, M. Imura, G. Narita, T. Kitano, Y. Hirose, N. Fujimoto, N. Okada, T. Kawashima, K. Iida, K. Balakrishnan, M. Tsuda, M. Iwaya, S. Kamiyama, H. Amano, I. Akasaki, Phys. Status Solidi A 203(7), 1632 (2006)

    Article  Google Scholar 

  37. H. Hirayama, S. Fujikawa, J. Norimatsu, T. Takano, K. Tsubaki, N. Kamata, Phys. Status Solidi C 6(S2), S356 (2009)

    Article  Google Scholar 

  38. R. Dalmau, B. Moody, R. Schlesser, S. Mita, J. Xie, M. Feneberg, B. Neuschl, K. Thonke, R. Collazo, A. Rice, J. Tweedie, Z. Sitar, J. Electrochem. Soc. 158(5), H530 (2011)

    Article  Google Scholar 

  39. V. Kueller, A. Knauer, F. Brunner, U. Zeimer, H. Rodriguez, M. Kneissl, M. Weyers, J. Cryst. Growth 315(1), 200 (2011)

    Article  Google Scholar 

  40. M. Conroy, V.Z. Zubialevich, H. Li, N. Petkov, J.D. Holmes, P.J. Parbrook, J. Mater. Chem. C 3, 431 (2015)

    Article  Google Scholar 

  41. V. Kueller, A. Knauer, U. Zeimer, M. Kneissl, M. Weyers, J. Cryst. Growth 368, 83 (2013)

    Article  Google Scholar 

  42. A. Mogilatenko, V. Küller, A. Knauer, J. Jeschke, U. Zeimer, M. Weyers, G. Tränkle, J. Cryst. Growth 402, 222 (2014)

    Article  Google Scholar 

  43. V. Kueller, A. Knauer, C. Reich, A. Mogilatenko, M. Weyers, J. Stellmach, T. Wernicke, M. Kneissl, Z. Yang, C. Chua, N. Johnson, IEEE 24(18), 1603 (2012)

    Google Scholar 

  44. G. Nishio, S. Yang, H. Miyake, K. Hiramatsu, J. Cryst. Growth 370, 74 (2013)

    Article  Google Scholar 

  45. U. Zeimer, V. Kueller, A. Knauer, A. Mogilatenko, M. Weyers, M. Kneissl, J. Cryst. Growth 377, 32 (2013)

    Article  Google Scholar 

  46. A. Knauer, V. Kueller, U. Zeimer, M. Weyers, C. Reich, M. Kneissl, Phys. Status Solidi A 210(3), 451 (2013)

    Article  Google Scholar 

  47. V. Adivarahan, Q. Fareed, S. Srivastava, T. Katona, M. Gaevski, Khan, Jap. J. Appl. Phys. 46, L537 (2007)

    Article  Google Scholar 

  48. J. Han, J. Figiel, M. Crawford, M. Banas, M. Bartram, R. Biefeld, Y. Song, A. Nurmikko, J. Cryst. Growth 195(14), 291 (1998)

    Article  Google Scholar 

  49. G. Jacopin, L. Rigutti, S. Bellei, P. Lavenus, F.H. Julien, A.V. Davydov, D. Tsvetkov, K.A. Bertness, N.A. Sanford, J.B. Schlager, M. Tchernycheva, Nanotechnology 23(32), 325701 (2012)

    Article  Google Scholar 

  50. A. Usikov, V. Soukhoveev, L. Shapovalov, A. Syrkin, V. Ivantsov, B. Scanlan, A. Nikiforov, A. Strittmatter, N. Johnson, J.G. Zheng, P. Spiberg, H. El-Ghoroury, Phys. Status Solidi A 207(6), 1295 (2010)

    Article  Google Scholar 

  51. S. Kurin, A. Antipov, I. Barash, A. Roenkov, A. Usikov, H. Helava, V. Ratnikov, N. Shmidt, A. Sakharov, S. Tarasov, E. Menkovich, I. Lamkin, B. Papchenko, Y. Makarov, Phys. Status Solidi C 11(3–4), 813 (2014)

    Article  Google Scholar 

  52. G.S. Lee, H. Jeon, S.G. Jung, S.M. Bae, M.J. Shin, K.H. Kim, S.N. Yi, M. Yang, H.S. Ahn, Y.M. Yu, S.W. Kim, H.J. Ha, N. Sawaki, Jpn. J. Appl. Phys. 51(1S), 01AG06 (2012)

    Google Scholar 

  53. S.M. Bae, H. Jeon, S.G. Lee, G.S. Jung, K.H. Kim, S.N. Yi, M. Yang, H.S. Ahn, Y.M. Yu, S.W. Kim, S.H. Cheon, H.J. Ha, N. Sawaki, J. Ceram. Proc. Res. 13, s75 (2012)

    Google Scholar 

  54. E. Richter, S. Fleischmann, D. Goran, S. Hagedorn, W. John, A. Mogilatenko, D. Prasai, U. Zeimer, M. Weyers, G. Tränkle, J. Electronic Mater. 49, 814 (2014)

    Article  Google Scholar 

  55. H.C. Chen, I. Ahmad, B. Zhang, A. Coleman, M. Sultana, V. Adivarahan, A. Khan, Phys. Status Solidi C 11(3–4), 408 (2014)

    Article  Google Scholar 

  56. T. Kinoshita, T. Obata, T. Nagashima, H. Yanagi, B. Moody, S. Mita, S. Ichiro Inoue, Y. Kumagai, A. Koukitu, Z. Sitar, Appl. Phys. Express 6(9), 092103 (2013)

    Article  Google Scholar 

  57. T. Baker, A. Mayo, Z. Veisi, P. Lu, J. Schmitt, Phys. Status Solidi C 11(3–4), 373 (2014)

    Article  Google Scholar 

  58. T. Nagashima, A. Hakomori, T. Shimoda, K. Hironaka, Y. Kubota, T. Kinoshita, R. Yamamoto, K. Takada, Y. Kumagai, A. Koukitu, H. Yanagi, J. Cryst. Growth 350(1), 75 (2012)

    Article  Google Scholar 

  59. T. Nomura, K. Okumura, H. Miyake, K. Hiramatsu, O. Eryu, Y. Yamada, J. Cryst. Growth 350(1), 69 (2012)

    Article  Google Scholar 

  60. Y. Kumagai, Y. Enatsu, M. Ishizuki, Y. Kubota, J. Tajima, T. Nagashima, H. Murakami, K. Takada, A. Koukitu, J. Cryst. Growth 312(18), 2530 (2010)

    Article  Google Scholar 

  61. H. Helava, T. Chemekova, O. Avdeev, E. Mokhov, S. Nagalyuk, Y. Makarov, M. Ramm, Phys. Status Solidi C 7(7–8), 2115 (2010)

    Article  Google Scholar 

  62. H.P. Maruska, J.J. Tietjen, Appl. Phys. Lett. 15, 327 (1969)

    Article  Google Scholar 

  63. F. Bugge, A.N. Efimov, I.G. Pichugin, A.M. Tsaregorodtsev, M.A. Chernov, Cryst. Res. Technol. 22(1), 65 (1987)

    Article  Google Scholar 

  64. A. Koukitu, J. Kikuchi, Y. Kangawa, Y. Kumagai, J. Cryst. Growth 281, 47 (2005)

    Article  Google Scholar 

  65. W. Seifert, G. Fitzl, E. Butter, J. Cryst. Growth 52, 257 (1981)

    Article  Google Scholar 

  66. Y. Kumagai, T. Yamane, T. Miyaji, H. Murakami, Y. Kangawa, A. Koukitu, Phys. Status Solidi C 0, 2498 (2003)

    Article  Google Scholar 

  67. A. Koukitu, S. Hama, T. Taki, H. Seki, Jpn. J. Appl. Phys. 37, 762 (1998)

    Article  Google Scholar 

  68. Y. Kumagai, K. Takemoto, J. Kikuchi, T. Hasegawa, H. Murakami, A. Koukitu, Phys. Status Solidi B 243, 1431 (2006)

    Article  Google Scholar 

  69. D.W. Shaw, Crystal Growth (Plenum, New York, 1978)

    Google Scholar 

  70. E. Richter, U. Zeimer, S. Hagedorn, M. Wagner, F. Brunner, M. Weyers, G. Tränkle. J. Cryst. Growth 312(18), 2537 (2010)

    Article  Google Scholar 

  71. B. Leung, Q. Sun, C.D. Yerino, J. Han, M.E. Coltrin, Semicond. Sci. Technol. 27, 024005 (2012)

    Article  Google Scholar 

  72. D. Du, D.J. Srolovitz, M.E. Coltrin, C.C. Mitchell, Phys. Rev. Lett. 95, 155503 (2005)

    Article  Google Scholar 

  73. A. Segal, A.V. Kondratyev, S.Y. Karpov, D. Martin, V. Wagner, M. Ilegems, J. Cryst. Growth 270, 384 (2004)

    Article  Google Scholar 

  74. A.S. Segal, D.S. Bazarevskiy, M.V. Bogdanov, E.V. Yakovlev, Phys. Status Solidi C 6(S2), S329 (2009)

    Article  Google Scholar 

  75. E. Richter, C. Hennig, M. Weyers, F. Habel, J.D. Tsay, W.Y. Liu, P. Brückner, F. Scholz, Y. Makarov, A. Segal, J. Kaeppeler, J. Cryst. Growth 277, 6 (2005)

    Article  Google Scholar 

  76. http://www.str-soft.com/products/Virtual_Reactor/hepigans/ (2014)

  77. Y. Kumagai, T. Yamane, A. Koukitu, J. Cryst. Growth 281, 62 (2005)

    Article  Google Scholar 

  78. T. Yamane, K. Hanaoka, H. Murakami, Y. Kumagai, A. Koukitu, Phys. Status Solidi C 8, 1471 (2011)

    Article  Google Scholar 

  79. K. Eriguchi, T. Hiratsuka, H. Murakami, Y. Kumagai, A. Koukitu, J. Cryst. Growth 310(17), 4016 (2008)

    Article  Google Scholar 

  80. G.S. Solomon, D.J. Miller, M. Ramsteiner, A. Trampert, O. Brandt, K.H. Ploog, Appl. Phys. Lett. 87(18), 181912 (2005)

    Article  Google Scholar 

  81. T. Sochacki, Z. Bryan, M. Amilusik, M. Bobea, M. Fijalkowski, I. Bryan, B. Lucznik, R. Collazo, J.L. Weyher, R. Kucharski, I. Grzegory, M. Bockowski, Z. Sitar, J. Cryst. Growth 394, 55 (2014)

    Article  Google Scholar 

  82. S. Mathis, A. Romanov, L. Chen, G. Beltz, W. Pompe, J. Speck, Phys. Status Solidi A 179(1), 125 (2000)

    Article  Google Scholar 

  83. Y. Kumagai, T. Nagashima, H. Murakami, K. Takada, A. Koukitu, Phys. Status Solidi C 5(6), 1512 (2008)

    Article  Google Scholar 

  84. O. Kovalenkov, V. Soukhoveev, V. Ivantsov, A. Usikov, V. Dmitriev, J. Cryst. Growth 281, 87 (2005)

    Article  Google Scholar 

  85. A. Krost, A. Dadgar, Mater. Sci. Eng. B 93, 77 (2002)

    Article  Google Scholar 

  86. T. Yoshida, Y. Oshima, T. Eri, K. Ikeda, S. Yamamoto, K. Watanabe, M. Shibata, T. Mishima, J. Cryst. Growth 310(1), 5 (2008)

    Article  Google Scholar 

  87. M. Lee, D. Mikulik, J. Kim, Y. Tak, J. Kim, M. Shim, Y. Park, U. Chung, E. Yoon, S. Park, Appl. Phys. Express 6(12), 125502 (2013)

    Article  Google Scholar 

  88. K. Motoki, T. Okahisa, R. Hirota, S. Nakahata, K. Uematsu, N. Matsumoto, J. Cryst. Growth 305(2), 377 (2007)

    Article  Google Scholar 

  89. M. Takami, A. Kurisu, Y. Abe, N. Okada, K. Tadatomo, Phys. Status Solidi C 8, 2101 (2011)

    Article  Google Scholar 

  90. N. Goriki, H. Miyake, K. Hiramatsu, T. Akiyama, T. Ito, O. Eryu, Jpn. J. Appl. Phys. 52, 08JB31 (2013)

    Google Scholar 

  91. O. Ambacher, J. Phys. D Appl. Phys. 31, 2653 (1998)

    Article  Google Scholar 

  92. K. Naniwae, S. Itoh, H. Amano, K. Itoh, K. Hiramatsu, I. Akasaki, J. Cryst. Growth 99, 381 (1990)

    Article  Google Scholar 

  93. S. Hagedorn, E. Richter, U. Zeimer, D. Prasai, W. John, M. Weyers, J. Cryst. Growth 353, 129 (2012)

    Article  Google Scholar 

  94. S. Hagedorn, E. Richter, U. Zeimer, M. Weyers, Phys. Status Solidi C 10, 355 (2013)

    Article  Google Scholar 

  95. D.M. Follstaedt, S.R. Lee, A.A. Allerman, J.A. Floro, J. Appl. Phys. 105, 083507 (2009)

    Article  Google Scholar 

Download references

Acknowledgements

The work on AlGaN was supported by the German Research Foundation in Project RI1224/1-1 and in the Collaborative Research Center 787 Semiconductor Nanophotonics.

Author information

Authors and Affiliations

  1. Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489, Berlin, Germany

    Eberhard Richter, Sylvia Hagedorn, Arne Knauer & Markus Weyers

Authors
  1. Eberhard Richter
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sylvia Hagedorn
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Arne Knauer
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Markus Weyers
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Eberhard Richter .

Editor information

Editors and Affiliations

  1. Institute of Solid state Physics, Technische Universität Berlin, Berlin, Germany

    Michael Kneissl

  2. Institute of Solid state Physics, Technische Universität Berlin, Berlin, Germany

    Jens Rass

Rights and permissions

Reprints and permissions

Copyright information

© 2016 Springer International Publishing Switzerland

About this chapter

Cite this chapter

Richter, E., Hagedorn, S., Knauer, A., Weyers, M. (2016). Vapor Phase Epitaxy of AlGaN Base Layers on Sapphire Substrates for Nitride-Based UV-Light Emitters. In: Kneissl, M., Rass, J. (eds) III-Nitride Ultraviolet Emitters. Springer Series in Materials Science, vol 227. Springer, Cham. https://doi.org/10.1007/978-3-319-24100-5_3

Download citation

Publish with us

Policies and ethics

Search

Navigation