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MEMS Nanopositioners

  • Chapter
Nanopositioning Technologies

Abstract

Nanopositioning mechanisms, or nanopositioners, have evolved quickly over the last few decades due to a growing need for nanoscale precision motion control in applications including microscopy, lithography, nanomanufacturing, and optics. The critical differentiator between nanopositioners and other motion stages is that nanopositioners are capable of nanoscale positioning resolution, which is generally interpreted as a few nanometers and below. Motion stages with mechanical elements that have friction, such as screws, linear bearing slides, and rotational bearings, are not capable of nanoscale resolution. The backlash caused by friction limits the precision in these mechanisms to tens of nanometers, and complex control systems are often required to reach this level. As a result, nanopositioner designs typically use a flexure mechanism to guide the motion of the stage, which exhibit no friction since the motion is based on structural bending, thereby providing continuous smooth movements.

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  1. National Institute of Standards and Technology, 100 Bureau Drive, Stop 8212, Gaithersburg, MD, 20899-8212, USA

    Jason J. Gorman

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  1. Harbin Engineering University, Harbin, China

    Changhai Ru

  2. McGill University Mechanical Engineering, Montreal, Québec, Canada

    Xinyu Liu

  3. Univ Toronto Dept Electrical & Comput, Toronto, Ontario, Canada

    Yu Sun

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Gorman, J.J. (2016). MEMS Nanopositioners. In: Ru, C., Liu, X., Sun, Y. (eds) Nanopositioning Technologies. Springer, Cham. https://doi.org/10.1007/978-3-319-23853-1_9

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