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Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism

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Nanopositioning Technologies

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Abstract

This chapter presents the design of parallel-kinematic nanopositioning stages with large workspace and low crosstalk. Based on compliant Roberts mechanism, the design of multi-axis parallel compliant stage is synthesized. A new XY nanopositioning stage is studied in detail. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of the compliant Roberts mechanisms. In addition, finite-element analysis (FEA) is carried out to validate its performance. A prototype is fabricated and tested through experimental studies. Results show that the XY stage delivers a work range larger than 12 mm in each axis. Moreover, the parasitic motion of the stage in the non-working direction is less than 1.7 % of the motion stroke. It indicates that the designed stage meets the requirements of a large stroke and high precision linear guiding mechanism, which demonstrates the feasibility of the proposed design ideas using the Roberts mechanism. Moreover, a feedback control using PID control algorithm is implemented to demonstrate the positioning performance of the developed XY stage. The reported ideas can also be extended to the design and control of other types of micro-/nanopositioning systems.

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Acknowledgements

The work was supported by the Macao Science and Technology Development Fund under Grant Nos.: 070/2012/A3 and 052/2014/A1, and the Research Committee of the University of Macau under Grant Nos.: MYRG083(L1-Y2)-FST12-XQS and MYRG078(Y1-L2)-FST13-XQS.

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Authors and Affiliations

  1. Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China

    Sicong Wan & Qingsong Xu

Authors
  1. Sicong Wan
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  2. Qingsong Xu
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Correspondence to Qingsong Xu .

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Editors and Affiliations

  1. Harbin Engineering University, Harbin, China

    Changhai Ru

  2. McGill University Mechanical Engineering, Montreal, Québec, Canada

    Xinyu Liu

  3. Univ Toronto Dept Electrical & Comput, Toronto, Ontario, Canada

    Yu Sun

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Wan, S., Xu, Q. (2016). Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism. In: Ru, C., Liu, X., Sun, Y. (eds) Nanopositioning Technologies. Springer, Cham. https://doi.org/10.1007/978-3-319-23853-1_4

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  • DOI: https://doi.org/10.1007/978-3-319-23853-1_4

  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-23852-4

  • Online ISBN: 978-3-319-23853-1

  • eBook Packages: EngineeringEngineering (R0)

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