Abstract
A systematic research effort in micromechanics in the context of MEMS (Microelectromechanical Systems) devices, mainly on fabrication and operation, began in the late 1980s. However, the beginning of micro- and nanotechnologies is commonly and arguably attributed to the year of 1959, when the renowned theoretical physicist Richard Phillips Feynman gave the prophetic lecture entitled “There is plenty of room at the bottom,” during the American Physical Society meeting at Caltech (Feynman 1960).
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Cotta, R.M., Knupp, D.C., Naveira-Cotta, C.P. (2016). Fundamentals and Methodologies. In: Analytical Heat and Fluid Flow in Microchannels and Microsystems. Mechanical Engineering Series. Springer, Cham. https://doi.org/10.1007/978-3-319-23312-3_1
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DOI: https://doi.org/10.1007/978-3-319-23312-3_1
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