Abstract
Multiscale experiments and models have repeatedly shown that thermal and mechanical properties of materials are a strong function of the length scale of measurement. This work uses a newly established nanomechanical Raman spectroscopy approach to analyze creep deformation of microscale Si cantilevers as a function of temperature and mechanical strain. This research reports in-situ creep properties of silicon micro-cantilevers in this temperature range under uniaxial compressive stress. The experimental setup consists of micro-scale mechanical loading platform and localized heating module. The results reveal that in the stress range of 50–150 MPa, the strain rate of the silicon cantilever increases linearly as a function of applied stress. The strain rate also increases a function of temperature increase. However, the strain rate increase slows down with increase in temperature. The strain rate of the microscale silicon cantilever (0.2–2.5 × 10−6 s−1) was comparable to literature values for bulk silicon reported in temperature range 1100–1300 °C but with only one tenth of the applied stress level. The relaxation of the near-surface atoms also contributes to the creep of the material. Analyses are also used to establish a surface stress relation in one dimensional nanostructures subjected to mechanical loading at high temperatures.
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References
Gan, M., Samvedi, V., Cerrone, A., Tomar, V.: Effect of microscale compression on nanoscale elastic modulus values of trabecular bone. Exp. Mech. 50(6), 773–781 (2010)
Gan, M., Tomar, V.: An in-situ platform for the investigation of Raman shift in micro-scale silicon structures as a function of mechanical stress and temperature increase. AIP Rev. Sci. Instrum. 85, 013902 (2014) (10 pp)
Gan, M., Tomar, V.: Surface stress variation as a function of applied compressive stress and temperature in microscale silicon. AIP J. Appl. Phys. 116, 073502 (2014) (10 p)
Gan, M., Tomar, V.: Temperature dependent microscale uniaxial creep of silicon and surface dominated deformation mechanisms. ASME J. Nanotechnol. Eng. Med. 5, 021004 (2014) (9 p)
Gan, M., Samvedi, V., Tomar, V.: A Raman spectroscopy based investigation of thermal conductivity of stressed silicon micro-cantilevers. AIAA J. Thermophys. Heat Transf. (2014). doi:10.2514/1.T4491
Yao, S.K., Xu, D.H., Xiong, B., Wang, Y.L.: The plastic and creep behavior of silicon microstructure at high temperature. In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. (2013)
Walters, D.S., Spearing, S.M.: On the flexural creep of single-crystal silicon. Scr. Mater. 42(8), 769–774 (2000)
Taylor, T.A., Barrett, C.R.: Creep and recovery of silicon single crystals. Mater. Sci. Eng. 10, 93–102 (1972)
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© 2016 The Society for Experimental Mechanics, Inc.
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Zhang, Y., Gan, M., Tomar, V. (2016). Small Scale Thermomechanics in Si with an Account of Surface Stress Measurements. In: Ralph, C., Silberstein, M., Thakre, P., Singh, R. (eds) Mechanics of Composite and Multi-functional Materials, Volume 7. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, Cham. https://doi.org/10.1007/978-3-319-21762-8_31
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DOI: https://doi.org/10.1007/978-3-319-21762-8_31
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-21761-1
Online ISBN: 978-3-319-21762-8
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