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Graphene Based Physical and Chemical Sensors

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Next Generation Sensors and Systems

Part of the book series: Smart Sensors, Measurement and Instrumentation ((SSMI,volume 16))

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Abstract

New nanostructured Schottky junctions based on graphene/platinum grown on different substrates are fabricated and investigated for sensing applications. The integration of graphene layer (s) on regular M-S junctions was only possible by using an ALD-grown platinum thin film (~40 nm) and then growing graphene in PECVD at temperatures lower than platinum silicide formation temperature (i.e., <700 °C). The electrochemical and radiation sensing behaviors were investigated using two different substrate types. The first is a moderately-doped n-type (e− conc. ≈ 2 × 1015 cm−3) silicon substrate in which a Schottky rectifier response with different threshold voltages was observed. An order of magnitude increase in generated current was observed with the use of high-resistivity silicon substrates (ρ ≥ 10,000 Ωcm). By adding a dielectric layer to form a graphene-metal-insulator-semiconductor junction (Graphene–MIS) a linear ohmic response was observed. The obtained responses were explained by studying the band diagrams for the different processes with the aid of XPS and Raman analyses that clearly indicated the p-doping of the graphene layer in response to γ-ray radiations, which resulted in a strong reversed current tunneled through the ultrathin platinum layer. In the case of high-resistivity silicon substrates, the reversed current is much stronger due to the weak forward current from the substrate, which resulted in a stronger reverse response and, ultimately, higher sensitivity. The uniqueness of the research is based on the process for growing the graphene layer on the M-S junction. Exfoliated graphene results in increased contact resistance and low e− mobility, which will not yield the desired effects.

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Authors and Affiliations

  1. The American University in Cairo, New Cairo, Egypt

    Mohamed Serry

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  1. Mohamed Serry
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Correspondence to Mohamed Serry .

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  1. School of Engineering and Advanced Technology (SEAT), Massey University, Palmerston North, New Zealand

    Subhas Chandra Mukhopadhyay

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Serry, M. (2016). Graphene Based Physical and Chemical Sensors. In: Mukhopadhyay, S. (eds) Next Generation Sensors and Systems. Smart Sensors, Measurement and Instrumentation, vol 16. Springer, Cham. https://doi.org/10.1007/978-3-319-21671-3_1

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  • DOI: https://doi.org/10.1007/978-3-319-21671-3_1

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  • Publisher Name: Springer, Cham

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