MEMS Technologies for Energy Harvesting

  • Manuel Domínguez-PumarEmail author
  • Joan Pons-Nin
  • Juan A. Chávez-Domínguez


The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and their application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. This is followed with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as introducing fixed magnets, buckling of beams or using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to actuation using piezoelectric materials is given. Examples of energy harvesters found in the literature using this actuation principle are also presented.


Piezoelectric Material Energy Harvester Piezoelectric Layer Proof Mass Nonlinear Spring 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer International Publishing Switzerland 2016

Authors and Affiliations

  • Manuel Domínguez-Pumar
    • 1
    Email author
  • Joan Pons-Nin
    • 1
  • Juan A. Chávez-Domínguez
    • 2
  1. 1.MNT-DEETechnical University of CataloniaBarcelonaSpain
  2. 2.GSS-DEETechnical University of CataloniaBarcelonaSpain

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