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Structural Nonlinear Dynamics and Diagnosis pp 183–200Cite as

Quasi-periodically Actuated Capacitive MEMS

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Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 168))

Abstract

This work reports on the effect of a quasi-periodic (QP) voltage on the dynamics of a resonant capacitive micro-electro-mechanical system (MEMS) under DC and AC actuations. We consider that the AC actuation is composed of resonant AC and non resonant AC voltages. The microstructure device is modelled as a lumped mass-spring-damper system. Averaging technique and the method of multiple scales are performed to obtain the modulation equations of the slow dynamic near the primary resonance. The influence of the amplitude and the frequency of a high frequency voltage (HFV) on the occurrence of bistability and jumps in the frequency response is examined and the safe basin of attraction is explored. The results of this work indicate that when the mechanical parameters of the MEMS device are fixed and cannot be tuned, a HFV can be used for controlling the dynamic of the resonant capacitive MEMS.

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Acknowledgments

The first author F.L. would like to thank the Alexander von Humboldt Foundation for the financial support.

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Authors and Affiliations

  1. University Hassan II Casablanca, BP. 5366 Maarif, Casablanca, Morocco

    Faouzi Lakrad & Mohamed Belhaq

Authors
  1. Faouzi Lakrad
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  2. Mohamed Belhaq
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Corresponding author

Correspondence to Faouzi Lakrad .

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Editors and Affiliations

  1. Laboratory of Mechanics, Hassan II-Casablanca University, Casablanca, Morocco

    Mohamed Belhaq

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Lakrad, F., Belhaq, M. (2015). Quasi-periodically Actuated Capacitive MEMS. In: Belhaq, M. (eds) Structural Nonlinear Dynamics and Diagnosis. Springer Proceedings in Physics, vol 168. Springer, Cham. https://doi.org/10.1007/978-3-319-19851-4_10

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