Abstract
Nanoscale imaging of biological samples in the lab as well as mask inspection in extreme ultraviolet lithography near the production line with sub 30 nm resolution require high spectral brightness soft x-ray sources. Laser produced plasma (LPP) sources and plasma based X-ray lasers (XRL) emit soft X-ray radiation in the wavelength region of interest between 2 and 20 nm. Whereas LPP sources easily can be tuned to the so called water window (2.2–4.4 nm) the output of an XRL is restricted to relatively few fixed wavelengths in the extreme ultraviolet range. However due to the relatively high degree of coherence the XRL is well suited also for nanoscale imaging using coherent techniques like coherent diffraction imaging or Fourier transform holography.
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Acknowledgement
Part of this work (LTXM) has been supported by BMBF program #13N8913. HS and KAJ gratefully acknowledge support by the german-korean collaboration program BMBF #KOR 10/016. HS, RJ, JT and CS gratefully acknowledge support by INREX (LaserLab Europe) program.
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Stiel, H. et al. (2016). Nanoscale Imaging Using Coherent and Incoherent Laboratory Based Soft X-Ray Sources. In: Rocca, J., Menoni, C., Marconi, M. (eds) X-Ray Lasers 2014. Springer Proceedings in Physics, vol 169. Springer, Cham. https://doi.org/10.1007/978-3-319-19521-6_35
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DOI: https://doi.org/10.1007/978-3-319-19521-6_35
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