Skip to main content
SpringerLink
Log in
Book cover

Short-Channel Organic Thin-Film Transistors pp 57–81Cite as

Fabrication Process

  • Chapter
  • First Online:

Part of the book series: Springer Theses ((Springer Theses))

Abstract

This chapter addresses the fabrication process of the low-voltage submicrometer OTFTs using vacuum evaporation through high-resolution silicon stencil masks.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD   109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Notes

  1. 1.

    The scanning electron microscope (SEM) is an electron microscope that produces an electronic image by moving a beam of focused electrons over an object and reading both the electrons scattered by the object and the secondary electrons produced by it.

  2. 2.

    The GDSII (Graphic Database System) is an industry standard database file format that is used for data exchange of IC layout artwork.

  3. 3.

    SKILL is a scripting language used in many software suites from Cadence Design Systems.

References

  1. H. Klauk (ed.), Organic Electronics: Materials, Manufacturing and Applications, 2nd edn. (Wiley-VCH, Weinheim, 2008)

    Google Scholar 

  2. OVPD mass production equipment, Spec Sheet, AIXTRON, 2013. http://www.aixtron.com/en/products/product-portfolio/

  3. F. Ante, F. Letzkus, J. Butschke, U. Zschieschang, J.N. Burghartz, K. Kern, H. Klauk, Top-contact organic transistors and complementary circuits fabricated using high-resolution silicon stencil masks, in Device Research Conference, June 2010, pp. 175–176

    Google Scholar 

  4. G.H. Gelinck, H.E.A. Huitema, E. van Veenendaal, E. Cantatore, L. Schrijnemakers, J.B.P.H. van der Putten, T.C.T. Geuns, M. Beenhakkers, J.B. Giesbers, B.-H. Huisman, E.J. Meijer, E.M. Benito, F.J. Touwslager, A.W. Marsman, B.J.E. van Rens, D.M. de Leeuw, Flexible active-matrix displays and shift registers based on solution-processed organic transistors. Nat. Mater. 3, 106–110 (2004)

    Article  CAS  Google Scholar 

  5. T. Sekitani, Y. Noguchi, U. Zschieschang, H. Klauk, T. Someya, Organic transistors manufactured using inkjet technology with subfemtoliter accuracy. Proc. Natl. Acad. Sci. USA 105(13), 4976–4980 (2008)

    Article  CAS  Google Scholar 

  6. Y.-Y. Noh, N. Zhao, M. Caironi, H. Sirringhaus, Downscaling of self-aligned, all-printed polymer thin-film transistors. Nat. Nanotechnol. 2, 784–789 (2007)

    Article  CAS  Google Scholar 

  7. D.J. Gundlach, T.N. Jackson, D.G. Schlom, S.F. Nelson, Solvent-induced phase transition in thermally evaporated pentacene films. Appl. Phys. Lett. 74(22), 3302–3304 (1999)

    Article  CAS  Google Scholar 

  8. T. Ji, S. Jung, V.K. Varadan, On the correlation of postannealing induced phase transition in pentacene with carrier transport. Org. Electron. 9(5), 895–898 (2008)

    Article  CAS  Google Scholar 

  9. F. Ante, F. Letzkus, J. Butschke, U. Zschieschang, K. Kern, J.N. Burghartz, H. Klauk, Submicron low-voltage organic transistors and circuits enabled by high-resolution silicon stencil masks, in IEEE International Solid-State Circuits Conference Technical Digest, Dec. 2010, pp. 21.6.1–21.6.4

    Google Scholar 

  10. F. Letzkus, T. Zaki, F. Ante, J. Butschke, H. Richter, H. Klauk, J.N. Burghartz, Si stencil masks for organic thin film transistor fabrication, in Proceedings of the SPIE Photomask Technology, Sept 2011, pp. 81662B-1–81662B-12

    Google Scholar 

  11. F. Letzkus, T. Zaki, F. Ante, J. Butschke, H. Richter, H. Klauk, J.N. Burghartz, Si Stencil-Masken für die Herstellung organischer Dünnschichttransistoren, in MikroSystemTechnik Kongress, pp. 181–184 (2011) (in German)

    Google Scholar 

  12. W. Clemens, D. Lupo, K. Hecker, S. Breitung, (eds.), OE-A roadmap for organic and printed electronics. White Paper, 5th edn. (Organic Electronics Association, 2013). http://www.oe-a.org/en_GB/

  13. E. Platzgummer, S. Cernusca, C. Klein, J. Klikovits, S. Kvasnica, H. Loeschner, eMET: 50 keV electron mask exposure tool development based on proven multi-beam projection technology, in Proceedings of the SPIE Photomask Technology, Sept 2010, pp. 782308-1–782308-12

    Google Scholar 

  14. R. Kaesmaier, A. Ehrmann, H. Löschnerc, Ion projection lithography: status of tool and mask developments. Microelectr. Eng. 57–58, 145–153 (2001)

    Article  Google Scholar 

  15. A.A. Tseng, Recent developments in nanofabrication using ion projection lithography. Small 1(6), 594–608 (2005)

    Article  CAS  Google Scholar 

  16. W.H. Bruenger, C. Dzionk, R. Berger, H. Grimm, A.H. Dietzel, F. Letzkus, R. Springer, Evaluation of ion projection using heavy ions suitable for resistless patterning of thin magnetic films. Microelectr. Eng. 61–62, 295–300 (2002)

    Article  Google Scholar 

  17. J. Butschke, A. Ehrmann, B. Höfflinger, M. Irmscher, R. Käsmaier, F. Letzkus, H. Löschnerb, J. Mathuni, C. Reuter, C. Schomburg, R. Springer, SOI wafer flow process for stencil mask fabrication. Microelectr. Eng. 46(1–4), 473–476 (1999)

    Article  CAS  Google Scholar 

  18. F. Letzkus, J. Butschke, B. Höfflinger, M. Irmscher, C. Reuter, R. Springer, A. Ehrmann, J. Mathuni, Dry etch improvements in the SOI wafer flow rocess for IPL stencil mask fabrication. Microelectr. Eng. 53(1–4), 609–612 (2000)

    Article  CAS  Google Scholar 

  19. F. Ante, Contact effects in organic transistors. Ph.D. dissertation, Swiss Federal Institute of Technology in Lausanne, Lausanne, Switzerland (2011)

    Google Scholar 

  20. H.C. Shah, R.W. Davis Jr, The effect of the roughness of the glass substrate on the roughness of the barrier layer used during fabrication of poly-Si TFTs. Soc. Inf. Display Symp. Tech. Digest 34(1), 1516–1519 (2003)

    Article  Google Scholar 

  21. U. Zschieschang, R. Hofmockel, R. Rödel, U. Kraft, M.J. Kang, K. Takimiya, T. Zaki, F. Letzkus, J. Butschke, H. Richter, J.N. Burghartz, H. Klauk, Megahertz operation of flexible low-voltage organic thin-film transistors. Org. Electron. 14(6), 1516–1520 (2013)

    Google Scholar 

  22. T. Zaki, R. Rödel, F. Letzkus, H. Richter, U. Zschieschang, H. Klauk, J.N. Burghartz, AC characterization of organic thin-film transistors with asymmetric gate-to-source and gate-to-drain overlaps. Org. Electron. 14(5), 1318–1322 (2013)

    Article  CAS  Google Scholar 

  23. U. Zschieschang, F. Ante, D. Kälblein, T. Yamamoto, K. Takimiya, H. Kuwabara, M. Ikeda, T. Sekitani, T. Someya, J. Blochwitz-Nimoth, H. Klauk, Dinaphtho[2,3-b:2’,3’-f]thieno[3,2-b]thiophene (DNTT) thin-film transistors with improved performance and stability. Org. Electron. 12(8), 1370–1375 (2011)

    Article  CAS  Google Scholar 

  24. H. Klauk, U. Zschieschang, J. Pflaum, M. Halik, Ultralow-power organic complementary circuits. Nature 445, 745–748 (2007)

    Article  CAS  Google Scholar 

  25. U. Zschieschang, F. Ante, M. Schloerholz, M. Schmidt, K. Kern, H. Klauk, Mixed self-assembled monolayer gate dielectric for continuous threshold voltage control in organic transistors and circuits. Adv. Mater. 22(40), 4489–4493 (2010)

    Article  CAS  Google Scholar 

  26. T. Zaki, Design of current-steering D/A converters using organic thin-film transistors enabled by high-resolution silicon stencil masks, M.Sc. thesis, University of Stuttgart, Stuttgart, BW, Germany (2010)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute for Microelectronics Stuttgart, Stuttgart, Germany

    Tarek Zaki

Authors
  1. Tarek Zaki
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Tarek Zaki .

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer International Publishing Switzerland

About this chapter

Cite this chapter

Zaki, T. (2015). Fabrication Process. In: Short-Channel Organic Thin-Film Transistors. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-319-18896-6_4

Download citation

Publish with us

Policies and ethics

Search

Navigation