Abstract
On ion-pumped UHV systems, it is of course necessary to bring the system pressure down from atmospheric to about 10−2 Torr before starting the ion pumps . This may be done in several ways, including the use of zeolite sorption pumps that are cooled to liquid nitrogen temperatures in order to physically adsorb all of the atmospheric gases. Because of the large quantity of air that must be removed by the zeolite, the process of reaching the limiting pressure sometimes exceeds 1 h. A method to remove the majority of the atmospheric gas has been reported that is free from the possibility of causing oil contamination [1]. The use of a rotary pump does not exclude this possibility.
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Yates, J.T. (2015). Pumping and Trapping. In: Experimental Innovations in Surface Science. Springer, Cham. https://doi.org/10.1007/978-3-319-17668-0_4
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DOI: https://doi.org/10.1007/978-3-319-17668-0_4
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