Abstract
Micromachining using ultra-short pulsed laser radiation can be used to manipulate matter without interacting with the surrounding matter. This ideal processing, called “cold ablation”, is attributed to picosecond and femtosecond laser radiation, and nowadays there are applications in some special industrial processes. But ultrafast laser radiation can also be used to heat matter very locally, allowing new processing strategies for welding or annealing. Starting from typical micro-machining conditions, the limitations and scaling up techniques for industrial ultra-short material processing are presented. Significant examples of possible industrial applications using ultrafast laser micromachining are presented, elucidating the applicability of this unique radiation source.
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Notes
- 1.
The aspect ratio is defined here as the ratio of the structure lateral size and the structure depth.
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Acknowledgments
This work was supported by German Research Foundation (DFG) within the Collaborative Research Centre CRC 653, ‘‘Gentelligent Components in their Lifecycle’’.
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Horn, A. et al. (2016). Micromachining. In: Nolte, S., Schrempel, F., Dausinger, F. (eds) Ultrashort Pulse Laser Technology. Springer Series in Optical Sciences, vol 195. Springer, Cham. https://doi.org/10.1007/978-3-319-17659-8_8
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DOI: https://doi.org/10.1007/978-3-319-17659-8_8
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