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Summary and Outlook

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High-Resolution Extreme Ultraviolet Microscopy

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Abstract

This chapter concludes the book and summarizes and discusses the achieved results with respect to results achieved by other groups. An outlook on future experiments and possibilities to improve the presented experiments is given.

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Notes

  1. 1.

    This is true at least for the CDI implementations presented in this thesis. In Sect. 2.5 novel less limited approaches reported in literature were discussed, e.g. ptychography.

  2. 2.

    It should be noted that the general idea of using iterative CDI methods for holographic reconstructions is well-known [2]. However, the implementation presented in this thesis allows a reconstruction of complex-valued objects.

  3. 3.

    Mostly opaque wires, needles or spider threads were imaged so far with XUV DIH.

  4. 4.

    Seaberg et al. [3] achieved \(\triangle r\approx 22\) nm at \(\lambda =13.5\) nm. However, the sample had a less complex spatial structure.

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Correspondence to Michael Werner Zürch .

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Zürch, M.W. (2015). Summary and Outlook. In: High-Resolution Extreme Ultraviolet Microscopy. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-319-12388-2_6

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