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Vacuum Chamber Design

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Rolling Contact Fatigue in a Vacuum
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Abstract

A discussion of mechanical testing in high vacuum is presented in this chapter. Vacuum component selection and test chamber materials are discussed with emphasis on what is needed for testing high speed rotating systems in vacuum similar to a rotating anode inside an x-ray tube device. Low speed testing of rotating systems to detect balance shift is also discussed, with emphasis on vibration transmittance through key vacuum components. Two case studies are explored that highlight the balance between cost and complexity related to chamber design and its long-term operation.

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Abbreviations

AFM:

Atomic force microscope

EB:

Electron beam

Hz:

Hertz cycles per second

K:

Thermal conductivity

L/s:

Liters per second

NO/NC:

Normally open/normally closed

PVD:

Physical vapor deposition

RCF:

Rolling contact fatigue

RF:

Radio frequency

RGA:

Residual gas analysis

RPM:

Revolutions per minute

Sccm:

Standard cubic centimeters per minute

VAC:

Volts alternating current

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Danyluk, M., Dhingra, A. (2015). Vacuum Chamber Design. In: Rolling Contact Fatigue in a Vacuum. Springer, Cham. https://doi.org/10.1007/978-3-319-11930-4_2

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