Abstract
Properties of the cathode region of glow discharge are analyzed depending on the character of cathode processes. Principles of magnetron discharged are described.
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© 2015 Springer International Publishing Switzerland
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Smirnov, B.M. (2015). Cathode and Wall Processes. In: Theory of Gas Discharge Plasma. Springer Series on Atomic, Optical, and Plasma Physics, vol 84. Springer, Cham. https://doi.org/10.1007/978-3-319-11065-3_9
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DOI: https://doi.org/10.1007/978-3-319-11065-3_9
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Publisher Name: Springer, Cham
Print ISBN: 978-3-319-11064-6
Online ISBN: 978-3-319-11065-3
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