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Nanotribology of MEMS/NEMS

  • Satish Achanta
  • Jean-Pierre Celis
Chapter
Part of the NanoScience and Technology book series (NANO)

Abstract

Micro-/Nano- electromechanical systems (MEMS/NEMS) are future devices that have a spectrum of applications ranging from rocket technology to biological sciences. Although MEMS devices are known for over two decades, very few categories of them are used in commercially applications due to their poor reliability. Tribological phenomena like stiction, friction, and wear are major issues affecting the reliability of contact MEMS/NEMS devices and micromotors, microgears, nanosliders, etc., are some examples in which reliability is greatly hampered by such dissipation processes. In recent years, lot of research was dedicated for improving the reliability of MEMS/NEMS through lab scale tribological studies e.g., nanotribological studies. Similar tribological studies were earlier carried out on components like magnetic storage devices, electrical connectors, etc., and were successfully tackled. Present chapter is an overview of the research done over the years to understand the phenomena like stiction, friction and wear in such devices. This chapter addresses the variety of tribological problems associated with MEMS/NEMS, tribological characterization through lab scale and in-situ techniques, and various solutions that are used for improving the reliability of such devices with respect to tribological problems.

Keywords

Micro-/Nano- Electromechanical systems (MEMS/NEMS) Tribology Stiction Friction Wear Nanotribology 

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Copyright information

© Springer International Publishing Switzerland 2015

Authors and Affiliations

  1. 1.Department of MTMKatholieke Universiteit LeuvenLeuvenBelgium

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