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SiC Nanostructured Films

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Silicon Carbide Nanostructures

Part of the book series: Engineering Materials and Processes ((EMP))

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Abstract

Silicon carbide films have been intensively investigated concerning their fabrications and properties. In general, the thickness of the fabricated silicon carbide films can range from many micrometers to many nanometers. In this chapter, however, we shall focus on the nanostructured SiC films including the films with thickness on the nanoscale and the films comprising SiC nanocrystals.

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Authors and Affiliations

  1. Department of Physics, Southeast University, Nanjing, 211189, China

    Jiyang Fan

  2. Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, China

    Paul K. Chu

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  1. Jiyang Fan
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  2. Paul K. Chu
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Correspondence to Jiyang Fan .

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© 2014 Springer International Publishing Switzerland

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Fan, J., Chu, P.K. (2014). SiC Nanostructured Films. In: Silicon Carbide Nanostructures. Engineering Materials and Processes. Springer, Cham. https://doi.org/10.1007/978-3-319-08726-9_7

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