Abstract
Parametric excitation, via electrostatic stiffness modulation, can be exploited in resonant MEMS gyroscopes. In the case of the rate gyroscope parametric excitation may be used to amplify either the response to angular rate. In the more complex mode of operation, known as “rate integrating,” the output of the gyro is angled directly as opposed to angular velocity in the case of rate gyro. In this rate-integrating mode of operation parametric excitation does offer an effective energy control used to initiate and sustain the vibration and minimize damping perturbations. A practical parametric excitation scheme implemented using digital signal processing has been developed for both the rate and rate-integrating gyro. Experimental results are presented demonstrating the benefit of using parametric excitation. By taking advantage of the phase dependence of parametric amplification and the orthogonality of the Coriolis force and quadrature forcing, the response to the applied angular velocity may be parametrically amplified by applying excitation of a particular phase directly to the sensing mode.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Acar, C., Shkel, A.: MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness. MEMS Reference Shelf Series. Springer, New York (2009)
Carr, D.W., Evoy, S., Sekaric, L., Craighead, H.G., Parpia, J.M.: Parametric amplification in a torsional microresonator. Appl. Phys. Lett. 77, 1545–1547 (2000)
Gallacher, B.J.: Principles of a micro-rate integrating ring gyroscope. IEEE Trans. Aero. Electron. Syst. 48, 658–672 (2012)
Gallacher, B.J., Burdess, J.S., Harish, K.M.: A control scheme for a MEMS electrostatic resonant gyroscope excited using combined parametric excitation and harmonic forcing. J. Micromech. Microeng. 16, 1–12 (2006)
Gallacher, B.J., Burdess, J.S., Harris, A.J.: Principles of a three-axis vibrating gyroscope. IEEE Trans. Aero. Electron. Syst. 37(4), 1333–1343 (2001)
Harish, K.M., Gallacher, B.J., Burdess, J.S., Neasham, J.A.: Experimental investigation of parametric and externally forced motion in resonant MEMS sensors. J. Micromech. Microeng. 19(1), 015021 (2009)
Hu, Z.X., Gallacher, B.J., Burdess, J.S., Fell, C.P., Townsend, K.: A parametrically amplified MEMS rate gyroscope. Sensor Actuat. A Phys. 167(2), 249–260 (2011)
Loper, E.J., Lynch, D.D.: The HRG: A new low-noise inertial rotation sensor. In: Sixteenth Joint Services Data Exchange for Inertial Systems, CA, 16–18 Nov 1982
Lynch, D.D.: Hemispherical resonator gyroscope in inertial technology for the future. IEEE Trans. Aero. Electron. Syst. 20(4), 414–444 (1984)
Nayfeh, A.H., Mook, D.T.: Nonlinear Oscillations. Wiley, New York (1970)
Rugar, D., Grutter, P.: Mechanical parametric amplification and thermomechanical noise squeezing. Phys. Rev. Lett. 67, 699–702 (1991)
Thomas, D.L.: Dynamics of rotationally periodic structures. Int. J. Numer. Meth. Eng. 14, 81–102 (1979)
Thomsen, J.J.: Vibrations and Stability. Springer, Berlin (2003)
Yazdi, N., Ayazi, F., Najafi, K.: Micromachined inertial sensors. IEEE Proc. 86(8), 1640–1659 (1998)
Zhang, W., Baskaran, R., Turner, K.L.: Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor. Sensor Actuat. Phys. A 102(1–2), 139–150 (2002)
Zhongxu, H., Gallacher, B.J., Harish, K.M., Burdess, J.S.: An experimental study of high gain parametric amplification in MEMS. Sensor Actuat. A Phys. 162(2), 145–154 (2010)
Acknowledgments
The authors would like to thank Goodrich Sensors and Integrated Systems (Plymouth UK), the Scottish Microelectronics Centre and the EPSRC for their support in all the projects that contributed to this work. The authors thank Jim Burdess for many useful and interesting discussions in relation to this body of work.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer International Publishing Switzerland
About this paper
Cite this paper
Gallacher, B.J., Hu, Z., Harish, K.M., Bowles, S., Grigg, H. (2014). The Application of Parametric Excitation in Resonant MEMS Gyroscopes. In: Awrejcewicz, J. (eds) Applied Non-Linear Dynamical Systems. Springer Proceedings in Mathematics & Statistics, vol 93. Springer, Cham. https://doi.org/10.1007/978-3-319-08266-0_36
Download citation
DOI: https://doi.org/10.1007/978-3-319-08266-0_36
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-08265-3
Online ISBN: 978-3-319-08266-0
eBook Packages: Mathematics and StatisticsMathematics and Statistics (R0)