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Reactive Phase Formation in Thin Films

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Thermodynamics, Diffusion and the Kirkendall Effect in Solids

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Abstract

In this chapter, we will discuss some aspects related to reactive phase formation in thin films. We try to utilize as much as possible the information accumulated during the earlier chapters and built on that. We will first have a brief look on nucleation issues, especially in solid state, before moving into effect of microstructure and impurities on the reactive phase formation. Finally, we will introduce some of the models for phase growth that have been introduced in the past and then discuss in detail about their pros and cons.

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References

  1. Russel, K.C. Colloid Interface Sci., 13, 205, 1980.

    Google Scholar 

  2. Coffey K.R., Clevenger L.A., Barmak K., Rudman D.A., and Thompson C.V., Appl. Phys. Lett., 55, 852, 1989.

    Google Scholar 

  3. Bormann R., Mat. Res. Soc. Symp. Proc., 343, 169, 1994.

    Google Scholar 

  4. d’ Heurle F.M., J. Mater. Res., 3, 167, 1988.

    Google Scholar 

  5. Eshelby J.D., Proc. R. Soc. A London Ser. A., 241, 376, 1957.

    Google Scholar 

  6. Saunders N. and. Miodownik A.P, CALPHAD, Calculation of Phase Diagrams, Pergammon Materials Series, Elsevier Science, 1998.

    Google Scholar 

  7. Kaufman L. and Bernstein H., Computer Calculation of Phase Diagrams, Academic Press, New York, 1970.

    Google Scholar 

  8. Ansara I., Pure Appl. Chem., 62, 71, 1990.

    Google Scholar 

  9. Lukas H.L., Weiss J., and Henig E.T., CALPHAD, 6, 229, 1982.

    Google Scholar 

  10. Bormann R. and Zöltzer K., phys. stat. sol.(a), 131, 691, 1992.

    Google Scholar 

  11. Thompson C.V., J. Mater. Res., 7, 367, 1992.

    Google Scholar 

  12. Newcomb S.B. and Tu K.N., Appl. Phys. Lett., 48, 1436, 1986.

    Google Scholar 

  13. Cotts E. J., Meng W.J., and Johnson W.L., Phys. Rev. Lett., 57, 2295, 1986.

    Google Scholar 

  14. Vredenberg A. M, Westendorp J.F.M., Saris F.W., van den Pers N.M., and de Keijser Th. H., J. Mater. Res., 1, 774, 1986.

    Google Scholar 

  15. Meng W.J., Nieh C.W., Ma E., Fultz B., and Johnson W.L., Mater. Sci. Eng., 97, 87, 1988.

    Google Scholar 

  16. Erhart P., Averback R., Hahn H., Yadavalli S., and Flynn C.P., J. Mater. Res., 3, 1276, 1988.

    Google Scholar 

  17. Johnson W.L., Dolgin B., and van Rossum M., in Glass:Current Issues, NATO ASI Series, eds. A.F. Wright and L. Dopuy, (Dordrecht:Martinus Nijhoff), 172, 1985.

    Google Scholar 

  18. Clemens B.M., J. Appl. Phys., 61, 4525, 1987.

    Google Scholar 

  19. Kelton K.F. and Greer A.L., J. Phys. Rev. B, 38, 10089, 1988.

    Google Scholar 

  20. Highmore R.J., Phil. Mag. B, 61, 455, 1990.

    Google Scholar 

  21. Christian J.W., The Theory of Transformations in Metals and Alloys, Part 1, (Oxford, Pergamon), 1975.

    Google Scholar 

  22. Barret C. and Massalski T.B., The Structure of Metals, (McGraw-Hill), 1966.

    Google Scholar 

  23. Brandes E. editor, Smithelss Metals Reference Book, 6th edition (London, Butterworths), 1983.

    Google Scholar 

  24. Saunders N. and Miodownik A.P., J. Mater. Res., 1, 38, 1986.

    Google Scholar 

  25. Turnbull D., Metall. Trans. A, 12, 695, 1981.

    Google Scholar 

  26. Greer A.L., Phil. Mag. B, 61, 525, 1990.

    Google Scholar 

  27. Barmak K., Gungor A., Cabral C., Jr., and Harper J. M. E., J. Appl. Phys., 94, 1605, 2003.

    Google Scholar 

  28. Harper J. M. E., Cabral C., Jr., Andricacos P. C., Gignac L., Noyan I. C., Rodbell K. P., and Hu C. K., J. Appl. Phys. 86, 2516, 1999.

    Google Scholar 

  29. Detavernier C., Deduytsche D., Van Meirhaeghe R. L., De Baerdemaeker J., and Dauwe C., Appl. Phys. Lett. 82, 1863, 2003.

    Google Scholar 

  30. Herd S., Tu K.N., and Ahn K.Y., Appl. Phys. Lett., 42, 597, 1983.

    Google Scholar 

  31. d’Heurle F.M., Petersson C.S., Baglin J.E.E., La Placa S.J., and Wong C.Y., J. Appl. Phys., 55, 4208, 1984.

    Google Scholar 

  32. Vanderwalker D.M., Appl. Phys. Lett., 48, 707, 1986.

    Google Scholar 

  33. Holloway K. and Sinclair R., J. Appl. Phys., 61, 1359, 1987.

    Google Scholar 

  34. Meyerheim H.L., Lengeler B., and Göbel H.E., J. Appl. Phys., 68, 2694, 1990.

    Google Scholar 

  35. W.L. Johnson, Prog. Mater. Sci., 30, 1986, 81.

    Google Scholar 

  36. W. Klement, R.H. Willens, and P. Duwez, Nature, 187, 1960, 869.

    Google Scholar 

  37. Clemens B.M., Johnson W.L., and Schwarz R.B., J. Non-Crystal. Solids, 61-62, 817, 1984.

    Google Scholar 

  38. Evans P.V., Garcia-Escorial A., Donovan P.E., and Greer A.L., MRS Symposium Proceedings, 57, 234, 1987.

    Google Scholar 

  39. E. Gebhardt and H. D. Sehezzi, Z. Metallkd., 50, 521, (1952).

    Google Scholar 

  40. H. Jehn and E. Olzi, J. Less-Common Met., 27, 297, (1972).

    Google Scholar 

  41. S. Stecura, Metall. Trans., 5, 1337, (1974).

    Google Scholar 

  42. R. Lauf and C. Altstetter, Scr. Metall., 11, 938, (1977).

    Google Scholar 

  43. G. Boreau and P. Gerdanian, J. Phys. Chem. Solids, 42, 749, (1981).

    Google Scholar 

  44. M.A. Nicolet, in: Diffusion in Amorphous Materials, eds. H. Jain and D. Gupta, (TMS Warrendale, 1994), pp. 225-234.

    Google Scholar 

  45. Desre P.J. and Yavari A.R., Phys. Rev. Lett., 64, 1533, 1990.

    Google Scholar 

  46. Desre P.J., Acta Metall. Mater., 39, 2309, 1991.

    Google Scholar 

  47. Grunthaner P. J., Grunthaner F. J., and Mayer J. W., J. Vac. Sci. Technol, 17, 924, 1980.

    Google Scholar 

  48. Cahn W. and Hilliard J. E., J. Chem. Phys, 28, 258, 1958.

    Google Scholar 

  49. Philibert J., Appl. Surf. Sci., 53, 74, 1991.

    Google Scholar 

  50. Kaur I. and Gust W., Fundamentals of Grain and Interphase Boundary Diffusion, Ziegler Press, 1989.

    Google Scholar 

  51. Cahn J.W., Acta Metall., 4, 449, (1956).

    Google Scholar 

  52. Ottaviani G., Thin Solid Films, 140, 3, 1986.

    Google Scholar 

  53. Christou A. and Day H.M., J. Electr. Mater., 5, 1, 1976.

    Google Scholar 

  54. Becht J.G.M., “The Influence of Phosphorous on the Solid State Reaction Between Copper and Silicon or Germanium”, Doctoral Thesis, Tech. University of Eindhoven Netherlands, 1987.

    Google Scholar 

  55. Hondros E. and Seah M., Int. Met. Rev, 22, 262, 1977.

    Google Scholar 

  56. Hondros E. and Seah M., Metall. Trans. A, 8A, 1363, 1977.

    Google Scholar 

  57. Guttmann M., Metall. Trans. A, 8A, 1383, 1977.

    Google Scholar 

  58. Poate J.M. and Tisone T.S., Appl. Phys. Lett., 24, 391, 1974.

    Google Scholar 

  59. Lau S.S., Mayer J.W., and Tu K.N., J. Appl. Phys., 49, 4005, 1978.

    Google Scholar 

  60. van Gurp G.J., van der Weg W.F., and Sigurd D., J. Appl. Phys., 49, 4011, 1978.

    Google Scholar 

  61. Scott D.M. and Nicolet M.-A., Phys. Stat. Solidi., 66, 773, 1981.

    Google Scholar 

  62. Tsaur B.Y., Lau S.S., Mayer J.W., and Nicolet M.-A., Appl. Phys. Lett., 38, 922, 1981.

    Google Scholar 

  63. Eizenberg M. and Tu K.N., J. Appl. Phys., 53, 6885, 1982.

    Google Scholar 

  64. Petersson C.S., Baglin J.E.E., Dempsey J.J., d’Heurle F.M. and La Place S.S., J. Appl. Phys., 53, 4866, 1982.

    Google Scholar 

  65. Canali C., Catellani F., Ottaviani G. and Prudenziati M., Appl. Phys. Lett., 33, 187, 1978.

    Google Scholar 

  66. Coulman B. and Chen H., J. Appl. Phys., 59, 3467, 1986.

    Google Scholar 

  67. Lien C.-D., Nicolet M.-A., and Lau S.S., Thin Solid Films, 143, 63, 1986.

    Google Scholar 

  68. d’Heurle F.M. and Petersson C.S., Thin Solid Films, 128, 283, 1985.

    Google Scholar 

  69. Gas P. and d’Heurle F.M., App. Surf. Sci.,73, 153, 1993.

    Google Scholar 

  70. Philibert J., Materials Science Forum, 155-156, 15, 1994.

    Google Scholar 

  71. d’ Heurle F.M., “The Kinetics of Reactive Phase Formation: Silicides”, in Silicides: Fundamentals and Applications, (Eds. L. Miglio and F. d’Heurle), World Scientific, pp. 169-186, 2001.

    Google Scholar 

  72. Gösele U. and Tu, K. N. J. Appl. Phys., 66, 2619, 1989.

    Google Scholar 

  73. Geguzin Ye Ya, Kaganovskiy Yu.S, Paritskaya L.M., and., Solunskiy V.I, Phys. Met. Metallogr., 47, 127, 1980.

    Google Scholar 

  74. Deal E. and Grove A.S., J. Appl. Phys., 36, 3770, 1965.

    Google Scholar 

  75. Farrel P., Gilmer G.H., and Suenaga M., Thin Solid Films, 25, 253, 1975.

    Google Scholar 

  76. Taguchi O., Iijima Y., and Hirano K., J. Japan Inst. Metals., 51, 4, 292, 1987.

    Google Scholar 

  77. Gösele U. and Tu K.N., J. Appl. Phys., 53, 3252, 1982.

    Google Scholar 

  78. Wagner C., Acta Metall., 17, 99, 1969.

    Google Scholar 

  79. Gulpen J., “Reactive Phase Formation in the Ni-Si System”, Doctoral Thesis, Technical University of Eindhoven, The Netherlands, 1995.

    Google Scholar 

  80. Rönkä K., “Time-Dependent Microstructural and Compositional Changes at the Interfaces between Materials in Electronics”, Doctoral Thesis, Helsinki University of Technology, Finland, 2001.

    Google Scholar 

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Authors and Affiliations

  1. Department of Materials Engineering, Indian Institute of Science, Bangalore, 560012, India

    Aloke Paul

  2. Department of Electrical Engineering and Automation, School of Electrical Engineering, Aalto University, Espoo, Finland

    Tomi Laurila & Vesa Vuorinen

  3. Institute for Materials Physics, University of Münster, Münster, Germany

    Sergiy V. Divinski

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  1. Aloke Paul
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  2. Tomi Laurila
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  3. Vesa Vuorinen
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  4. Sergiy V. Divinski
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Correspondence to Aloke Paul .

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Paul, A., Laurila, T., Vuorinen, V., Divinski, S.V. (2014). Reactive Phase Formation in Thin Films. In: Thermodynamics, Diffusion and the Kirkendall Effect in Solids. Springer, Cham. https://doi.org/10.1007/978-3-319-07461-0_11

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  • DOI: https://doi.org/10.1007/978-3-319-07461-0_11

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  • Publisher Name: Springer, Cham

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