Abstract
Up to this point, nanopositioning controllers have used displacement sensors as the feedback variable. The major drawbacks of typical displacement sensors are the limited bandwidth associated measurement noise.
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Notes
- 1.
The power spectral density of an electronic device is approximately constant above the 1/f corner frequency, while below this frequency, it is approximately proportional to the inverse of frequency (Horowitz and Hill 1989).
- 2.
A Matlab implementation of this algorithm is freely available by contacting the first author.
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Fleming, A.J., Leang, K.K. (2014). Force Feedback Control. In: Design, Modeling and Control of Nanopositioning Systems. Advances in Industrial Control. Springer, Cham. https://doi.org/10.1007/978-3-319-06617-2_8
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DOI: https://doi.org/10.1007/978-3-319-06617-2_8
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