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Design, Modeling and Control of Nanopositioning Systems pp 43–55Cite as

Types of Nanopositioners

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Part of the book series: Advances in Industrial Control ((AIC))

Abstract

The term nanopositioner is used generally to describe a wide variety of mechanical positioning devices with resolution in the nanometer range. Typically, a nanopositioner comprises a moving platform suspended by a number of compliant mechanisms or flexures (see example in Fig. 1.1). The flexures may provide a preloading force on the actuator and guide the motion of the stage.

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References

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Author information

Authors and Affiliations

  1. School of Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia

    Andrew J. Fleming

  2. Mechanical Engineering, University of Nevada, Reno, Reno, NV, USA

    Kam K. Leang

Authors
  1. Andrew J. Fleming
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  2. Kam K. Leang
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Corresponding author

Correspondence to Andrew J. Fleming .

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© 2014 Springer International Publishing Switzerland

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Fleming, A.J., Leang, K.K. (2014). Types of Nanopositioners . In: Design, Modeling and Control of Nanopositioning Systems. Advances in Industrial Control. Springer, Cham. https://doi.org/10.1007/978-3-319-06617-2_3

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  • DOI: https://doi.org/10.1007/978-3-319-06617-2_3

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-06616-5

  • Online ISBN: 978-3-319-06617-2

  • eBook Packages: EngineeringEngineering (R0)

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