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Development of Measurement System for 3D Microscope

  • Yeon-Beom Choi
  • Kee-Jun Nam
  • Woo-Jun Kim
  • Doo-Hee Jung
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 306)

Abstract

In this paper, we propose a measurement system for three-dimensional microscope which is designed to move the objective lens in two directions polar and azimuth angle. By only two measurements of adjusting polar angle with the controller and measuring the length of the object through camera, we can get three-dimensional information of the object like height, step and angle. Servo-controllers, PC interface, image acquisition software and image processing software have been developed for this system and experimental results show the effectiveness of the proposed system.

Keywords

3D measurement Microscope Polar angle Azimuth angle 

Notes

Acknowledgements

This research was supported by the MSIP (Ministry of Science, ICT and Future Planning), Korea, under the C-ITRC (Convergence Information Technology Research Center) support program (NIPA-2013-H0401-13-1006) supervised by the NIPA (National IT Industry Promotion Agency)

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Yeon-Beom Choi
    • 1
  • Kee-Jun Nam
    • 1
  • Woo-Jun Kim
    • 2
  • Doo-Hee Jung
    • 1
  1. 1.Department of Electronics EngineeringKorea Polytechnic UniversityGyeonggi-doSouth Korea
  2. 2.GlonikGasan-dong, Geumcheon-gu, SeoulSouth Korea

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