Thermal Manipulation Utilizing Micro-cantilever Probe in Scanning Electron Microscopy

  • Anthony Yu-Tung Wang
  • Cheng-Chun Huang
  • Yao-Chuan Tsai
  • Ming-Dao Wu
  • Dao Liang
  • Po-Jen Shih
  • Wen-Pin ShihEmail author
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 306)


We present a novel design for a sensitive temperature micro-probe, situated at the tip of an atomic force microscopy cantilever. The temperature-sensing element utilizes a platinum resistance thermometer, which is well-known for its measurement reproducibility and chemical inertness. The probe is fabricated using conventional clean room techniques and then processed by focused ion beam milling and material deposition. The probe is able to be mounted to a movable platform inside a scanning electron microscope, enabling simultaneous characterization of a sample’s surface temperature and material topology. Furthermore, by reversing the detection mechanism of the platinum resistance thermometer, localized sample surface heating can be achieved, allowing small-scale sample manipulation and characterization. Such an ability to simultaneously characterize a material’s surface topology and temperature has not been previously reported in literature, and lends great practicality in the fields of materials research and integrated circuits diagnostics.


Micro-cantilever Thermometer Focused ion beam Atomic force microscopy 



The author would like to thank the co-operative education program of the University of Waterloo, Canada for the opportunity to conduct research abroad at the National Taiwan University. The author would also like to thank the Tiny Machines and Mechanics Laboratory and the Nano-Electro-Mechanical-Systems Research Center of National Taiwan University for hosting this project, and providing funding and the necessary facilities to carry out the research. This project was supported by the National Science Council of Taiwan, under contract No. 102-2221-E-002-242.


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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Anthony Yu-Tung Wang
    • 1
    • 2
  • Cheng-Chun Huang
    • 2
  • Yao-Chuan Tsai
    • 2
  • Ming-Dao Wu
    • 2
  • Dao Liang
    • 2
  • Po-Jen Shih
    • 3
  • Wen-Pin Shih
    • 2
    Email author
  1. 1.University of WaterlooWaterlooCanada
  2. 2.National Taiwan UniversityTaipei CityTaiwan
  3. 3.National University of KaohsiungKaohsiung CityTaiwan

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