Real-Time Monitoring System for Industrial Motion and Optical Micro Vibration Detection

  • HyungTae KimEmail author
  • Cheolho Kim
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 306)


Sensitive processes in semiconductor manufacturing require the isolation and quick absorption of vibration. In this study, a monitoring system for driving motion and detecting vibration was developed for active vibration isolation and absorption. The monitoring system was an expandable embedded system with functions of motor control, signal conversion, data communication, on-board memory, and IO interfaces. The vibration in this system was at the micro level, so laser gap sensors were used, and a connection was made with a monitoring system using TCP/IP to minimize noise in the data transfer line. A motion and vibration profile was acquired with the developed system.


Micro vibration Isolation Absorption control Laser gap sensor Embedded system Realtime monitoring 



This work was funded and supported by the Korea Institute of Industrial Technology and Ministry of Trade, Industry and Energy. The authors are grateful to Delta Tau Korea ( for technical support, and to RMS Technology ( for air mounts.


  1. 1.
    Bessason B, Madshus C, Frøystein HA, Kolbjørnsen H (1999) Vibration criteria for metrology laboratories. Meas Sci Technol 10(11):1009–1014CrossRefGoogle Scholar
  2. 2.
    Heo JW, Chung JT (2002) Vibration and noise reduction of an optical disk drive by using a vibration absorber. IEEE Trans Consum Electron 48(4):874–878Google Scholar
  3. 3.
    Kato T, Kawashima K, Sawamoto K, Kagawa T (2010) A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables. Precision Eng 34:43–48CrossRefGoogle Scholar
  4. 4.
    Kim HT, Kim CH, Kang SB, Moon SJ, Lee GS (2013) A hybrid structure of dual stators and a pneumatic spring for resonance control in an air mount. J Electromagn Anal Appl 5(3):114–119Google Scholar
  5. 5.
    Rygalin VG, Grechinskii DA, Sobolev AB (1975) Use of laser equipment to detect mechanical resonances and to stabilize vibration parameters at a specified value. Meas Tech 18(5):722–723CrossRefGoogle Scholar
  6. 6.
    Zastrogin YF, Zastrogin OY (1992) Methods and devices for vibration control. Meas Tech 35(1):89–94CrossRefGoogle Scholar
  7. 7.
    Kim JK, Chang TH, Kim HS, Kang MS (2004) Adaptive compensation of motional disturbances for laser Doppler vibrometer. In: Proceeding of the IEEE Industrial Electronics Society, Piscataway, NJ, 3:2081–2085Google Scholar
  8. 8.
    Zhen S, Chen B, Yuan L, Li M, Liang J, Yu B (2010) A novel interferometric vibration measurement sensor with quadrature detection based on 18 wave plate. Opt Laser Technol 42:362–365CrossRefGoogle Scholar
  9. 9.
    Eppel A, Enikov ET, Insperger T, Gabor S (2010) Feasibility study of optical detection of chatter vibration during milling. Int J Optomechatronics 4:195–214CrossRefGoogle Scholar
  10. 10.
    Ni YQ, Ying ZG, Chen ZH (2011) Micro-vibration suppression of equipment supported on a floor incorporating magneto-rheological elastomercore. J Sound Vib 330:4369–4383CrossRefGoogle Scholar
  11. 11.
    Kim HT, Kim CH, Kang SB, Lee KW, Baek JH, Han HH (2012) A 3DOF model for an electromagnetic air mount. Adv Acoust Vib 2012:218429Google Scholar
  12. 12.
    Kim HT, Kim CH, Choi SB, Moon SJ and Song WG (2012) Triple mechanism of an active air spring combining pneumatics, electro-magnets and MR fluid in an air mount. In: Proceedings of international conference on sound and vibrationGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Manufacturing System R&D GroupKITECHChenAnSouth Korea

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