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Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry

  • G. G. Melpignano
  • A. Schaap
  • Y. Bellouard
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 306)

Abstract

The design, fabrication and characterisation of an uniaxial scanning-mirror component for interferometry applications is presented. The device is fabricated in fused silica by means of femtosecond laser irradiation and a selective etching step. The fabricated actuator produces bidirectional, repeatable sinusoidal motion with a displacement (200 μm) larger than the wavelengths under investigation (300–700 nm), rendering it suitable for application within an interferometry setup. This indicates that future fabrication of fully integrated interferometer measurement devices in fused silica are realisable.

Keywords

Fourier transform spectrometry Fused silica Femtosecond laser machining Halbach magnet array Actuator Birefringence Microsystems 

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Eindhoven University of TechnologyEindhovenThe Netherlands

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