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Resistive Switching in MIM Capacitors Using Porous Anodic Alumina

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Physics of Semiconductor Devices

Part of the book series: Environmental Science and Engineering ((ENVENG))

Abstract

Bipolar resistive switching phenomena have been observed in TiN/AAO/TiN structures. Porous anodic aluminium oxide (AAO) membranes with pore diameters ranging from 15 to 50 nm were prepared by two step anodization in oxalic acid under specific reaction condition on TiN layer. The nanochannel arrays of AAO membranes were characterized with field-emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). AAO membrane was sandwiched between two conducting TiN layers to fabricate MIM structures. Good stability in resistive switching behaviour up to several cycles and a ~ 2x resistance ratio has been achieved.

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Author information

Authors and Affiliations

  1. VLSI Eng. Lab., Department of Electronics and ECE, Indian Institute of Technology, Kharagpur, 721302, India

    K. Mukherjee, S. Upreti, A. Bag, S. Mallik & C. K. Maiti

  2. Centre for Research in NanoScience and Nanotechnology, University of Calcutta, Kolkata, 700098, India

    M. Palit & S. Chattopadhyay

  3. Department of Electronic Science, University of Calcutta, Kolkata, 700009, India

    S. Chattopadhyay

Authors
  1. K. Mukherjee
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  2. S. Upreti
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  3. A. Bag
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  4. S. Mallik
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  5. M. Palit
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  6. S. Chattopadhyay
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  7. C. K. Maiti
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Corresponding author

Correspondence to K. Mukherjee .

Editor information

Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

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Mukherjee, K. et al. (2014). Resistive Switching in MIM Capacitors Using Porous Anodic Alumina. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_8

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