Skip to main content
SpringerLink
Log in
Book cover

Physics of Semiconductor Devices pp 77–80Cite as

Structural and Optical Characterization of β-Ga2O3 Thin Films Grown by Pulsed Laser Deposition

  • Conference paper

Part of the book series: Environmental Science and Engineering ((ENVENG))

Abstract

Polycrystalline β-Ga2O3 thin films were grown on sapphire substrate (0001) by pulsed laser deposition (PLD) technique. The crystalline structure and optical band gap were studied as a function of growth temperature, laser beam energy, annealing temperature and time. To tailor the band gap of β-Ga2O3 thin films by Al diffusion from the sapphire substrate the films were annealed for 24 h at different temperatures. The amount of Al diffusion was different for different temperatures of annealing which resulted in the increase of band gap as well as the shift of diffraction peaks to higher angles with increasing temperature. The annealed films showed high transparency in the deep UV region of the spectrum.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD   329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. S. Geller, J. Chem. Phys. 33 (1960) 676.

    Google Scholar 

  2. J. Ahman, G. Svensson, and J. Albertsson, ActaCrystallogr. Sect. C52 (1996) 1336.

    Google Scholar 

  3. H. H. Tippins, Phys. Rev. A 140 (1965) 316.

    Article  Google Scholar 

  4. T. Matsumoto, M. Aoki, A. Kinoshita, and T. Aono, Jpn. J. Appl. Phys. 13 (1974) 1578.

    Article  Google Scholar 

  5. H. G. Kim and W.-T. Kim, J. Appl. Phys. 62 (1987) 2000.

    Google Scholar 

  6. N. Ueda, H. Hosono, R. Waseda, and H. Kawazoe, Appl. Phys. Lett. 71 (1997) 933.

    Article  Google Scholar 

  7. Z. Hajnal, J. Miro, G. Kiss, F. Reti, P. Deak, R. C. Herndon, and J. M. Kuperberg, J. Appl. Phys. 86 (1999) 3792.

    Google Scholar 

  8. M. Passlack, M. Hong, and J. P. Mannaerts, Appl. Phys. Lett. 68 (1996) 1099.

    Article  Google Scholar 

  9. Z. Li, C. de Groot, J. Jagadeesh, and H. Moodera, Appl. Phys. Lett. 77 (2000) 3630.

    Article  Google Scholar 

  10. L. Binet and D. Gourier, J. Phys. Chem. Solids 59 (1998) 1241.

    Google Scholar 

  11. M. Fleischer and H. Meixner, J. Appl. Phys. 74 (1993) 300.

    Google Scholar 

  12. A. Callegari, P. D. Hoh, D.A. Buchanan and D. Lacey, Appl. Phys. Lett. 54 (1989) 332.

    Article  Google Scholar 

  13. Ching-Ting Lee, Hong-Wei Chen, and Hsin-Ying Lee, Appl. Phys. Lett. 82 (2003) 4304.

    Article  Google Scholar 

  14. F. K. Shan, G. X. Liu, W. J. Lee, G. H. Lee, I. S. Kim, and B. C. Shin, J. Appl. Phys. 98 (2005) 023504.

    Google Scholar 

  15. M. Passlack, E. F. Schubert, W. S. Hobson, M. Hong, N. Moriya, S. Chu, K. Konstadinidis, J. P. Mannaerts, M. L. Schnoes, and G. J. Zydzik, J. Appl. Phys. 77 (1995) 686.

    Google Scholar 

  16. Encarnación G. Víllora, Kiyoshi Shimamura, Kenji Kitamura, and Kazuo Aoki, Appl. Phys. Lett. 88 (2006) 031105.

    Article  Google Scholar 

  17. Yutaka et al, Journal of ceramic society of Japan 117(9) (2009) 973-977.

    Google Scholar 

  18. Yoshihiro Kokubun, Kasumi Miura, Fumie Endo, and Shinji Nakagomi, Appl. Phys. Lett. 90 (2007) 031912.

    Article  Google Scholar 

  19. M. Ogita, N. Saika, Y. Nakanishi and Y. Hatanaka, Applied Surface Science 142 (1999) 188 .

    Article  Google Scholar 

  20. C. Babana, Y. Toyoda and M. Ogita, Thin Solid Films 484 (2005) 369.

    Article  Google Scholar 

  21. Kiyoshi Shimamura, Encarnacio, Kay Domen, Keiichi Yui, Kazuo Aoki and Noboru Ichinose, Japanese Journal of Applied Physics, 44 (2005) L7.

    Google Scholar 

  22. Doo Hyun Kim, Seung Ho Yoo, Taek-Mo Chung, KiSeok An, HeeSoo Yoo, and Yunsoo Kim, Bull. Korean Chem. Soc. 23 (2002) 225.

    Google Scholar 

  23. Sin-Liang Oua, Dong-Sing Wuua, Yu-Chuan Fu, Shu-Ping Liu, Ray-Hu Horng, Lei Liud, Zhe-Chuan Fengd, Materials Chemistry and Physics 133 (2012) 700.

    Article  Google Scholar 

  24. Sang-A Lee et al, Appl. Phy. Lett. 89 (2006) 182906.

    Google Scholar 

  25. Rong Huang, Hiroyuki Hayashi, Fumiyasu Oba, and Isao Tanaka, Journal of Applied Physics 101(2007) 063526.

    Article  Google Scholar 

  26. Masahiro Orita, Hidenori Hiramatsu, Hiromichi Ohta, Masahiro Hirano, Hideo Hoson Thin Solid Films 411 (2002) 134.

    Article  Google Scholar 

  27. B.D. Cullity, Elements of X-ray Diffraction, second ed., Addison Wesley, 1978, pp.99.

    Google Scholar 

  28. C.S. Barrett, Structure of Metals, third ed., McGraw-Hill, 1968, pp.205.

    Google Scholar 

  29. C.H. Ma, J.H. Huang, Haydn Chen, Thin Solid Films 418 (2002) 73.

    Article  Google Scholar 

  30. M. Fleischer, W. Hanrieder, and H. Meixner, Thin Solid Films 190 (1990) 93.

    Article  Google Scholar 

  31. G. A. Battiston, R. Gerbasi, M. Porchia, R. Bertoncello, and F. Caccavale, Thin Solid Films 279 (1996) 115.

    Article  Google Scholar 

Download references

Acknowledgments

The authors would like to thank Dr. R Muralidharan, Director SSPL for his support in carrying out the work.

Author information

Authors and Affiliations

  1. Solid State Physics Laboratory, Lucknow Road, TimarPur, Delhi, 110054, India

    Anshu Goyal, Brajesh S. Yadav, O. P. Thakur & A. K. Kapoor

Authors
  1. Anshu Goyal
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Brajesh S. Yadav
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. O. P. Thakur
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. K. Kapoor
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Anshu Goyal .

Editor information

Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer International Publishing Switzerland

About this paper

Cite this paper

Goyal, A., Yadav, B.S., Thakur, O.P., Kapoor, A.K. (2014). Structural and Optical Characterization of β-Ga2O3 Thin Films Grown by Pulsed Laser Deposition. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_18

Download citation

Publish with us

Policies and ethics

Search

Navigation