Synthesis and Characterization of Phosphorus Doped Hydrogenated Silicon Films by Filtered Cathodic Vacuum Arc Technique

  • Ajay Kesarwani
  • O. S. Panwar
  • R. K. Tripathi
  • Sreekumar Chockalingam
Part of the Environmental Science and Engineering book series (ESE)


Phosphorous doped hydrogenated silicon thin film has been deposited by filtered cathodic vacuum arc technique at different substrate temperatures at a fixed hydrogen gas pressure. X-ray diffraction, electrical conductivity and optical band gap and scanning electron microscopy have been used to characterize the properties of films.


Filtered cathodic vacuum arc X-ray diffraction Conductivity Activation energy Optical band gap P doped hydrogenated silicon film 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.



The authors are grateful to Prof. R. C. Budhani, Director, CSIR-National Physical Laboratory, New Delhi (India) for his kind permission to publish this paper. They wish to thank to Dr. Sushil Kumar, Mr. C. M. S. Rauthan and Mr. Atul Bisht for useful discussion. Mr. Ajay Kumar Kesarwani is grateful to the Council of Scientific and Industrial Research (CSIR), Government of India and Mr. R. K. Tripathi is grateful to the Ministry of New and Renewable Energy (MNRE), Government of India for providing financial assistant during the course of this work.


  1. 1.
    S. Sriraman, S. Agrawal, E. S. Aydil, D. Maroudas, Nature 418 (2002) 62.CrossRefGoogle Scholar
  2. 2.
    Biaggi-Labiosa, F. Sol′a, O. Resto, L. F. Fonseca, A. Gonz′alez-Berr′ıos, J. De Jes′us J De, G. Morell, Nanotechnol. 19 (2008) 225202.Google Scholar
  3. 3.
    D. Y. Song, D. Inns, A. Straub, M. L. Terry, P. Campbell, A. G. Aberle, Thin Solid Films 513 (2006) 356.CrossRefGoogle Scholar
  4. 4.
    A. V. Shah, J. Meier, E. V. Sauvain, N. Wyrsch, U. Kroll, C. Droz, U. Graf, Solar Energy Mater. Sol. Cells 78 (2003) 469.Google Scholar
  5. 5.
    S. Paul, Solar Energy Mater. Sol. Cells 78 (2003) 349.Google Scholar
  6. 6.
    H. D. Yang, C. Y. Wu, J. K. Huang, R. Q. Ding, Y. Zhao, X. H. Geng, S. Z. Xiong, Thin Solid Films 472 (2005) 125.CrossRefGoogle Scholar
  7. 7.
    D. Y. Song, E.C. Cho, G. Conibeer, C. Flynn, Y.D. Huang, M.A. Green, Solar Energy Mater. Sol. Cells 92 (2008) 474.Google Scholar
  8. 8.
    B.Yan, C. S. Jiang, C. W. Teplin, H. R. Moutinho, M. M. Al-Jassim, J. Yang, S. Guha, J. Appl. Phys. 101 (2007) 033712.Google Scholar
  9. 9.
    V. S. Waman, M. M. Kamble, S. S. Ghosh, A. Mayabadi, V. G. Sathe, D. P. Amalnekar, H. M. Pathan, S. R. Jadkar, J. Nanosci. Nanotechnol. 12 (2012) 8459.Google Scholar
  10. 10.
    W. C. Choi, C. K. Kim, E. K. Kim, C. M. Shim, D. Jung, C. Y. Park, J. Korean Physical Soc. 36 (2000) 23.Google Scholar
  11. 11.
    J. Robertson, Mater. Sci. Eng. R, 37 (2002) 129.Google Scholar
  12. 12.
    P. J. Fallon, V. S. Veerasamy, C. A. Davis. J. Robertson, G. A. J. Amaratunga, W. I. Milne, J. Koskinen, Phys. Rev. B 48 (1993) 4777.CrossRefGoogle Scholar
  13. 13.
    P. J. Martin, A1.4 Cathodic Arc Deposition, Handbook of Thin Film Process Technology, IOP Publishing Ltd., 1995.Google Scholar
  14. 14.
    O. S. Panwar, Y. Aparna, S. M. Shivaprasad, M. A. Khan, B. S. Satyanarayana, R. Bhattacharyya, Appl. Surf. Sci. 221 (2004) 392.Google Scholar
  15. 15.
    O. S. Panwar, B. Deb, B. S. Satyanarayana, M. A. Khan, R. Bhattacharyya, A. K. Pal, Thin Solid Film 472 (2005) 180.Google Scholar
  16. 16.
    O. S. Panwar, M. A. Khan, G. Bhagavanarayana, P. N. Dixit, Sushil Kumar, C. M. S. Rauthan, Indian J. Pure and Appl. Phys. 46 (2008) 797.Google Scholar
  17. 17.
    O. S. Panwar, M. A. Khan, B. Bhattacharjee, A. K. Pal, B. S. Satyanarayana, P. N. Dixit, R. Bhattacharyya, M. Y. Khan, Thin Solid Films 515 (2006) 1597.CrossRefGoogle Scholar
  18. 18.
    R. L. Boxman, S. Goldsmith, A. B. Shalom, L. Kaplan, D. Arbilly, E. Gidalevich, V. Zhitomirsky, A. Ishaya, M. Keidar, I. I. Beilis, IEEE Transactions on plasma science 23 (1995) 939.CrossRefGoogle Scholar
  19. 19.
    M. M. M. Bilek, W.I. Milne, Thin Solid Films 290-291(1996) 299.CrossRefGoogle Scholar
  20. 20.
    J. Han, M. Tan, J. Zhu, S. Meng, B. Wang, S. Mu, D. Cao, Appl. Phys. Lett. 90 (2007) 083508.CrossRefGoogle Scholar
  21. 21.
    Y. Sakuma, H. Liu, H. Shirai, Y. Moriya, H. Ueyama, Thin Solid Films 386 (2001) 256.CrossRefGoogle Scholar
  22. 22.
    V. L. Dalal, J. Graves, J. Leib, Appl. Phys. Lett. 85 (2004) 1413.CrossRefGoogle Scholar
  23. 23.
    K. Bruhne, M. B. Schuberk, C. Kohler, J. H. Werner, Thin Solid Films, 396 (2001)163.CrossRefGoogle Scholar
  24. 24.
    M. F. Baroughi, S. Sivoththaman, Semicond. Sci. Technol. 21 (2006) 979.CrossRefGoogle Scholar
  25. 25.
    O. S. Panwar, C. Mukherjee, R. Bhattacharya, Solar Energy Mater. Sol. Cells 57 (1999) 373.Google Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Ajay Kesarwani
    • 1
  • O. S. Panwar
    • 1
  • R. K. Tripathi
    • 1
  • Sreekumar Chockalingam
    • 1
  1. 1.Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting DivisionCSIR-National Physical LaboratoryNew DelhiIndia

Personalised recommendations