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Synthesis and Characterization of Phosphorus Doped Hydrogenated Silicon Films by Filtered Cathodic Vacuum Arc Technique

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Physics of Semiconductor Devices

Part of the book series: Environmental Science and Engineering ((ENVENG))

Abstract

Phosphorous doped hydrogenated silicon thin film has been deposited by filtered cathodic vacuum arc technique at different substrate temperatures at a fixed hydrogen gas pressure. X-ray diffraction, electrical conductivity and optical band gap and scanning electron microscopy have been used to characterize the properties of films.

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References

  1. S. Sriraman, S. Agrawal, E. S. Aydil, D. Maroudas, Nature 418 (2002) 62.

    Article  Google Scholar 

  2. Biaggi-Labiosa, F. Sol′a, O. Resto, L. F. Fonseca, A. Gonz′alez-Berr′ıos, J. De Jes′us J De, G. Morell, Nanotechnol. 19 (2008) 225202.

    Google Scholar 

  3. D. Y. Song, D. Inns, A. Straub, M. L. Terry, P. Campbell, A. G. Aberle, Thin Solid Films 513 (2006) 356.

    Article  Google Scholar 

  4. A. V. Shah, J. Meier, E. V. Sauvain, N. Wyrsch, U. Kroll, C. Droz, U. Graf, Solar Energy Mater. Sol. Cells 78 (2003) 469.

    Google Scholar 

  5. S. Paul, Solar Energy Mater. Sol. Cells 78 (2003) 349.

    Google Scholar 

  6. H. D. Yang, C. Y. Wu, J. K. Huang, R. Q. Ding, Y. Zhao, X. H. Geng, S. Z. Xiong, Thin Solid Films 472 (2005) 125.

    Article  Google Scholar 

  7. D. Y. Song, E.C. Cho, G. Conibeer, C. Flynn, Y.D. Huang, M.A. Green, Solar Energy Mater. Sol. Cells 92 (2008) 474.

    Google Scholar 

  8. B.Yan, C. S. Jiang, C. W. Teplin, H. R. Moutinho, M. M. Al-Jassim, J. Yang, S. Guha, J. Appl. Phys. 101 (2007) 033712.

    Google Scholar 

  9. V. S. Waman, M. M. Kamble, S. S. Ghosh, A. Mayabadi, V. G. Sathe, D. P. Amalnekar, H. M. Pathan, S. R. Jadkar, J. Nanosci. Nanotechnol. 12 (2012) 8459.

    Google Scholar 

  10. W. C. Choi, C. K. Kim, E. K. Kim, C. M. Shim, D. Jung, C. Y. Park, J. Korean Physical Soc. 36 (2000) 23.

    Google Scholar 

  11. J. Robertson, Mater. Sci. Eng. R, 37 (2002) 129.

    Google Scholar 

  12. P. J. Fallon, V. S. Veerasamy, C. A. Davis. J. Robertson, G. A. J. Amaratunga, W. I. Milne, J. Koskinen, Phys. Rev. B 48 (1993) 4777.

    Article  Google Scholar 

  13. P. J. Martin, A1.4 Cathodic Arc Deposition, Handbook of Thin Film Process Technology, IOP Publishing Ltd., 1995.

    Google Scholar 

  14. O. S. Panwar, Y. Aparna, S. M. Shivaprasad, M. A. Khan, B. S. Satyanarayana, R. Bhattacharyya, Appl. Surf. Sci. 221 (2004) 392.

    Google Scholar 

  15. O. S. Panwar, B. Deb, B. S. Satyanarayana, M. A. Khan, R. Bhattacharyya, A. K. Pal, Thin Solid Film 472 (2005) 180.

    Google Scholar 

  16. O. S. Panwar, M. A. Khan, G. Bhagavanarayana, P. N. Dixit, Sushil Kumar, C. M. S. Rauthan, Indian J. Pure and Appl. Phys. 46 (2008) 797.

    Google Scholar 

  17. O. S. Panwar, M. A. Khan, B. Bhattacharjee, A. K. Pal, B. S. Satyanarayana, P. N. Dixit, R. Bhattacharyya, M. Y. Khan, Thin Solid Films 515 (2006) 1597.

    Article  Google Scholar 

  18. R. L. Boxman, S. Goldsmith, A. B. Shalom, L. Kaplan, D. Arbilly, E. Gidalevich, V. Zhitomirsky, A. Ishaya, M. Keidar, I. I. Beilis, IEEE Transactions on plasma science 23 (1995) 939.

    Article  Google Scholar 

  19. M. M. M. Bilek, W.I. Milne, Thin Solid Films 290-291(1996) 299.

    Article  Google Scholar 

  20. J. Han, M. Tan, J. Zhu, S. Meng, B. Wang, S. Mu, D. Cao, Appl. Phys. Lett. 90 (2007) 083508.

    Article  Google Scholar 

  21. Y. Sakuma, H. Liu, H. Shirai, Y. Moriya, H. Ueyama, Thin Solid Films 386 (2001) 256.

    Article  Google Scholar 

  22. V. L. Dalal, J. Graves, J. Leib, Appl. Phys. Lett. 85 (2004) 1413.

    Article  Google Scholar 

  23. K. Bruhne, M. B. Schuberk, C. Kohler, J. H. Werner, Thin Solid Films, 396 (2001)163.

    Article  Google Scholar 

  24. M. F. Baroughi, S. Sivoththaman, Semicond. Sci. Technol. 21 (2006) 979.

    Article  Google Scholar 

  25. O. S. Panwar, C. Mukherjee, R. Bhattacharya, Solar Energy Mater. Sol. Cells 57 (1999) 373.

    Google Scholar 

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Acknowledgments

The authors are grateful to Prof. R. C. Budhani, Director, CSIR-National Physical Laboratory, New Delhi (India) for his kind permission to publish this paper. They wish to thank to Dr. Sushil Kumar, Mr. C. M. S. Rauthan and Mr. Atul Bisht for useful discussion. Mr. Ajay Kumar Kesarwani is grateful to the Council of Scientific and Industrial Research (CSIR), Government of India and Mr. R. K. Tripathi is grateful to the Ministry of New and Renewable Energy (MNRE), Government of India for providing financial assistant during the course of this work.

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Authors and Affiliations

  1. Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting Division, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi, 110012, India

    Ajay Kesarwani, O. S. Panwar, R. K. Tripathi & Sreekumar Chockalingam

Authors
  1. Ajay Kesarwani
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  2. O. S. Panwar
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  3. R. K. Tripathi
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  4. Sreekumar Chockalingam
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Corresponding author

Correspondence to O. S. Panwar .

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Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

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Kesarwani, A., Panwar, O.S., Tripathi, R.K., Chockalingam, S. (2014). Synthesis and Characterization of Phosphorus Doped Hydrogenated Silicon Films by Filtered Cathodic Vacuum Arc Technique. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_137

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