Abstract
This paper focuses on design of Piezoresistive MEMS resonator for operation beyond 1 GHz, using FEM simulations. A method for simulation of transconductance of MEMS resonator is presented for first time. Lateral bulk acoustic mode of Twin beam resonator is simulated using the proposed method to get transconductance-frequency plot. Dimensions of the structure are optimized for best operation near 1.3 GHz. Design aspects of resonator including biasing effects, damping effects and anchoring variations are studied.
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Acknowledgments
Authors acknowledge NPMASS (National program on micro and smart systems) of Govt. of India for providing necessary support and funds to purchase Coventorware software.
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© 2014 Springer International Publishing Switzerland
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Pasula, V.V., Nair, D.R., DasGupta, A. (2014). Design of a Piezoresistive MEMS Resonator Operating Beyond 1 GHz. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_115
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DOI: https://doi.org/10.1007/978-3-319-03002-9_115
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-03001-2
Online ISBN: 978-3-319-03002-9
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