Design of a Piezoresistive MEMS Resonator Operating Beyond 1 GHz
This paper focuses on design of Piezoresistive MEMS resonator for operation beyond 1 GHz, using FEM simulations. A method for simulation of transconductance of MEMS resonator is presented for first time. Lateral bulk acoustic mode of Twin beam resonator is simulated using the proposed method to get transconductance-frequency plot. Dimensions of the structure are optimized for best operation near 1.3 GHz. Design aspects of resonator including biasing effects, damping effects and anchoring variations are studied.
KeywordsPiezoresistive MEMS resonator Simulation of transconductance
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Authors acknowledge NPMASS (National program on micro and smart systems) of Govt. of India for providing necessary support and funds to purchase Coventorware software.
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