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Design Aspects of a MEMS Based Bi-axial Mirror

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Physics of Semiconductor Devices

Part of the book series: Environmental Science and Engineering ((ENVENG))

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Abstract

MEMS based bi-axial mirrors have become important because of their application in the field of projection display systems. Here, design aspects of a MEMS based bi-axial mirror are presented and discussed.

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References

  1. David W. Wine Microvision, Inc

    Google Scholar 

  2. Davis, IEEE/LEOS Aug 2008, pp31-32

    Google Scholar 

  3. H Urey, Proc. SPIE Vol.4773(2002), 27-37.

    Google Scholar 

  4. H Schenk et al, Proc. SPIE Vol4178(2000), 116-125

    Google Scholar 

  5. Daniel J. Keating, Intellisense corporation

    Google Scholar 

  6. D.M Bloom, SPIE, Vol.3013 III, PP. 165-71, 1997

    Google Scholar 

  7. Wei Dong Sensor and actuators A 120(2005)

    Google Scholar 

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Acknowledgments

Authors are thankful to Director, SSPL for support & permission to publish this paper.

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Authors and Affiliations

  1. Solid State Physics Laboratory, Lucknow Road, Timarpur, Delhi, 110054, India

    Aklesh Kumar Meena, Ranvir Singh, Yashoda Parmar, Vinita Gond, M. Islam & Amita Gupta

Authors
  1. Aklesh Kumar Meena
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  2. Ranvir Singh
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  3. Yashoda Parmar
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  4. Vinita Gond
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  5. M. Islam
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  6. Amita Gupta
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Corresponding author

Correspondence to Aklesh Kumar Meena .

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Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

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© 2014 Springer International Publishing Switzerland

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Meena, A.K., Singh, R., Parmar, Y., Gond, V., Islam, M., Gupta, A. (2014). Design Aspects of a MEMS Based Bi-axial Mirror. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_107

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