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FIB Nanostructures pp 373–389Cite as

FIB Design for Nanofluidic Applications

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Part of the book series: Lecture Notes in Nanoscale Science and Technology ((LNNST,volume 20))

Abstract

In this chapter we briefly review the techniques available to researchers in the nanofluidic domain to fabricate nanopores and nanochannels. In this context the focused ion beam (FIB) technique will be introduced as a useful and versatile tool for nanofluidics. We illustrate it with two specific examples involving nanopores as building blocks for nanofluidics.

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Acknowledgements

We thank CLYM for providing access to FIB.

Author information

Authors and Affiliations

  1. Institut Lumière Matière, UMR5306 Université Lyon 1-CNRS, Université de Lyon, 69622, Villeurbanne cedex, France

    R. Fulcrand, N. P. Blanchard, A.-L. Biance, A. Siria & P. Poncharal

  2. Department of Civil and Environmental Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA

    L. Bocquet

Authors
  1. R. Fulcrand
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  2. N. P. Blanchard
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  3. A.-L. Biance
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  4. A. Siria
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  5. P. Poncharal
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  6. L. Bocquet
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Corresponding author

Correspondence to R. Fulcrand .

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Editors and Affiliations

  1. State Key Laboratory of Electronic, University of Electronic Science and Technology, Chengdu, People's Republic of China

    Zhiming M. Wang

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Fulcrand, R., Blanchard, N.P., Biance, AL., Siria, A., Poncharal, P., Bocquet, L. (2013). FIB Design for Nanofluidic Applications. In: Wang, Z. (eds) FIB Nanostructures. Lecture Notes in Nanoscale Science and Technology, vol 20. Springer, Cham. https://doi.org/10.1007/978-3-319-02874-3_15

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