Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition pp 133-135 | Cite as
Summary and Main Conclusions
Chapter
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Abstract
The deposition of nanostructures by focused beams, of either electrons or ions, is a novel method of nanofabrication with potential. These deposition techniques, known as focused ion beam induced deposition (FIBID) and focused electron beam induced deposition (FEBID), have been developed in the last 30 years and are now being allocated a large number of scientific and technical resources in order to achieve many goals in the field of nanotechnology.
Keywords
Critical Current Density Deposition Parameter Focus Beam Precursor Material Current Density Increase
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