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Summary and Main Conclusions

  • Rosa Córdoba CastilloEmail author
Chapter
  • 587 Downloads
Part of the Springer Theses book series (Springer Theses)

Abstract

The deposition of nanostructures by focused beams, of either electrons or ions, is a novel method of nanofabrication with potential. These deposition techniques, known as focused ion beam induced deposition (FIBID) and focused electron beam induced deposition (FEBID), have been developed in the last 30 years and are now being allocated a large number of scientific and technical resources in order to achieve many goals in the field of nanotechnology.

Keywords

Critical Current Density Deposition Parameter Focus Beam Precursor Material Current Density Increase 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Laboratorio de Microscopías Avanzadas-Instituto de Nanociencia de Aragón; Department of Condensed Matter PhysicsUniversidad de ZaragozaZaragozaSpain

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