Summary and Main Conclusions

  • Rosa Córdoba CastilloEmail author
Part of the Springer Theses book series (Springer Theses)


The deposition of nanostructures by focused beams, of either electrons or ions, is a novel method of nanofabrication with potential. These deposition techniques, known as focused ion beam induced deposition (FIBID) and focused electron beam induced deposition (FEBID), have been developed in the last 30 years and are now being allocated a large number of scientific and technical resources in order to achieve many goals in the field of nanotechnology.


Critical Current Density Deposition Parameter Focus Beam Precursor Material Current Density Increase 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. 1.
    Fernández-Pacheco, A., De Teresa, J.M., Córdoba, R., Ibarra, M.R.: Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition. J. Phys. D Appl. Phys. 42(5), 055005 (2009)Google Scholar
  2. 2.
    Córdoba, R., Sesé, J., De Teresa, J.M., Ibarra, M.R.: High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current. Microelectron. Eng. 87(5–8), 1550–1553 (2010)CrossRefGoogle Scholar
  3. 3.
    Córdoba, R., Fernández-Pacheco, R., Fernández-Pacheco, A., Gloter, A., Magén, C., Stephan, O., Ibarra, M.R., De Teresa, J.M.: Nanoscale chemical and structural study of Co-based FEBID structures by STEM-EELS and HRTEM. Nanoscale Res. Lett. 6, 1–6 (2011)CrossRefGoogle Scholar
  4. 4.
    Serrano-Ramón, L., Córdoba, R., Rodriguez, L.A., Magén, C., Snoeck, E., Gatel, C., Serrano, I., Ibarra, M.R., De Teresa, J.M.: Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition. ACS Nano 5(10), 7781–7787 (2011)CrossRefGoogle Scholar
  5. 5.
    van Kouwen, L., Botman, A., Hagen, C.W.: Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope. Nano Lett. 9(5), 2149–2152 (2009)ADSCrossRefGoogle Scholar
  6. 6.
    Serrano-Ramón, L.E.: Thesis, Universidad de Zaragoza (in progress)Google Scholar
  7. 7.
    Lavrijsen, R., Córdoba, R., Schoenaker, F.J., Ellis, T.H., Barcones, B., Kohlhepp, J.T., Swagten, H.J.M., Koopmans, B., De Teresa, J.M., Magén, C., Ibarra, M.R., Trompenaars, P., Mulders, J.J.L.: Fe:O:C grown by focused-electron-beam-induced deposition: magnetic and electric properties. Nanotechnology 22(2), 025302 (2011)Google Scholar
  8. 8.
    Córdoba, R., Lavrijsen, R., Fernández-Pacheco, A., Ibarra, M.R., Schoenaker, F., Ellis, T., Barcones-Campo, B., Kohlhepp, J.T., Swagten, H.J. M., Koopmans, B., Mulders, J.J.L., De Teresa, J.M.: Giant anomalous Hall effect in Fe-based microwires grown by focused-electron-beam-induced deposition. J. Phys. D: Appl. Phys. 45(3), 035001 (2012)Google Scholar
  9. 9.
    Córdoba, R., Baturina, T.I., Sesé, J., Mironov, A.Y., De Teresa, J.M., Ibarra, M.R., Nasimov, D.A., Gutakovskii, A.K., Latyshev, A.V., Guillamón, I., Suderow, H., Vieira, S., Baklanov, M.R., Palacios, J.J., Vinokur, V.M.: Magnetic field-induced dissipation-free state in superconducting nanostructures. Nat. Commun. 4, 1437 (2013)CrossRefGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Laboratorio de Microscopías Avanzadas-Instituto de Nanociencia de Aragón; Department of Condensed Matter PhysicsUniversidad de ZaragozaZaragozaSpain

Personalised recommendations