Abstract
FinFETs represent exciting new technology. Nanowire FinFETs are more promising than the bulk-silicon FinFETs. As they have the gate capacitance in closer proximity to the whole of the channel, they control the short-channel effects very well and also suppress the leakage current. Key to the superior performance of these devices is high carrier mobility. The focus of this chapter is the fundamental of this mobility in the framework of the SNM (simple, novel, malleable) model for quantum-confined nanowires. Extensive investigation has been carried out to address the role of quantum confinement and dielectric confinement on mobility enhancement in nanowire FinFETs. Impacts of ionized impurity scattering, acoustic phonon scattering, and dislocation scattering on the carrier mobility have been examined. Calculated results have been compared with available experiments. These results have also been used to suggest possible modifications in the design of nanowire FinFETs.
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Colinge, J.-P.: FinFETs and other multigate transistors. Springer, New York, NY (2007)
Fan, H.J., Werner, P., Zacharias, M.: Small 2, 700 (2006)
Mohammad, S.N.: J. Appl. Phys. 110, 084310 (2011)
Kotlyar, R., Obradovic, B., Matagne, P., Stettler, M., Giles, M.D.: Appl. Phys. Lett. 84, 5270 (2004)
Barraud, S., Sarrazin, E., Bournel, A.: Semicond. Sci. Technol. 26, 025001 (2011)
Wang, J., Polizzi, E., Ghosh, A., Datta, S., Lundstrom, M.S.: Appl. Phys. Lett. 87, 043101 (2005)
Jena, D., Konor, A.: Phys. Rev. Lett. 98, 136805 (2007)
Fonoberov, V.A., Balandin, A.A.: Nano Lett. 6, 2442 (2006)
Sakaki, H.: Jpn. J. Appl. Phys. 19, L735 (1980)
Ramayya, E.B., Vasileska, D., Goodnick, S.M., Knezevic, I.: J. Appl. Phys. 104, 063711 (2008)
Khanal, D.R., Levander, A.X., Yu, K.M., Liliental-Weber, Z., Walukiewicz, W., Grandal, J., Sanchez-Garcıa, M.A., Calleja, E., Wu, J.: J. Appl. Phys. 110, 033705 (2011)
Jena, D., Konor, A.: J. Appl. Phys. 102, 123705 (2007)
Mohammad, S.N.: Nanotechnology 23, 285707 (2012)
Mohammad, S.N.: J. Chem. Phys. 125, 094705 (2006)
Mohammad, S.N.: J. Chem. Phys. 127, 244702 (2007)
Schmidt, M., Kusche, R., Issendorff, V.B., Heberland, H.: Nature 393, 238 (1998)
Bertsch, G.: Science 277, 1619 (1997)
Jiang, Q., Zhang, Z., Li, J.C.: Acta Mater. 48, 4791 (2000)
Lamber, R., Wetjen, S., Jaeger, N.I.: Phys. Rev. B 51, 10968 (1995)
Goldstein, A.N., Echer, C.M., Alivisatos, A.P.: Science 256, 1425 (1992)
Janczuk, B., Jcik, W.W., Guindo, M.C., Chibowski, E., Gonzalez, F., Ballero, C.: Mater. Chem. Phys. 37, 64 (1993)
Nanda, K.K., Maisels, A., Kruis, F.E., Fissan, H., Stappert, S.: Phys. Rev. Lett. 91, 106102 (2003)
Mohammad, S.N.: Adv. Mater. 24, 1262 (2012)
Jiang, Q., Lu, H.M., Zhao, M.: J. Phys. Condens. Matter 16, 521 (2004)
Mehl, M.J., Papaconstantopoulos, D.A.: Phys. Rev. B 54, 4519 (1996)
Lindemann, F.A.: Z. Phys. 11, 609 (1910)
Mohammad, S.N.: J. Appl. Phys. 110, 054311 (2011)
Coombes, C.J.: J. Phys. F: Metal Phys. 2, 441 (1972)
Nanda, K.K.: Appl. Phys. Lett. 87, 021909 (2005)
Zhang, Y., Suenaga, K., Colliex, C., Iijima, S.: Science 281, 973 (1998)
Mohammad, S.N.: J. Appl. Phys. 107, 114304 (2010)
Wang, Y., Luo, Z., Li, B., Ho, P.S., Yao, Z., Shi, L., Bryan, E.N., Nemanich, R.J.: J. Appl. Phys. 101, 124310 (2007)
Ho, G.H., Wong, A.S.W., Wee, A.T.S., Welland, M.E.: Nano Lett. 4, 2023 (2004)
Cui, L.-F., Ruffo, R., Chan, C.K., Peng, H., Cui, Y.: Nano Lett. 9, 491 (2009)
Dan, Y., Seo, K., Takei, K., Meza, J.H., Javey, A., Crozier, K.B.: Nano Lett. 11, 2527 (2011)
Bogart, T. D., Lu, X. and Korgel, B. A.: Dalton Trans. 42, 12675 (2013)
Zhang, Q., Bayliss, S.C.: J. Appl. Phys. 79, 1351 (1996)
Bruno, M., Palummo, M., Marini, A., Del Sole, R., Ossicini, S.: Phys. Rev. Lett. 98, 036807 (2007)
Wolkin, M.V., Jorne, J., Fauchet, P.M., Allan, G., Delerue, C.: Phys. Rev. Lett. 82, 197 (1999)
Street, R.A.: Adv. Phys. 30, 593 (1981)
Ma, D.D.D., Lee, C.S., Au, F.C.K., Tong, S.Y., Lee, S.T.: Science 299, 1874 (2003)
Nolan, M., O’Callaghan, S., Fagas, G., Greer, J.C., Frauenheim, T.: Nano Lett. 7, 34 (2007)
Scheel, H., Reich, S., Thomsen, C.: Phys. Status Solidi (b) 242, 2474 (2005)
Lin, Y.-M., Sun, X., Dresselhaus, M.S.: Phys. Rev. B 62, 4610 (2000)
Rustagi, S.C., Singh, N., Lim, Y.F., Zhang, G., Wang, S., Lo, G.Q., Balasubramanian, N., Kwong, D.-L.: IEEE Electron Devices Lett. 28, 909 (2007)
Leonard, F., Talin, A.A.: Phys. Rev. Lett. 97, 026804 (2006)
Park, N.-M., Kim, T.-S., Park, S.-J.: Appl. Phys. Lett. 78, 2575 (2001)
Wang, W.C., Frietzsche, H.: J. Non Cryst. Solids 97–98, 919 (1987)
Gen, C., Yu, V., Kaznacheev, A., Yunovich, A.E.: Fiz. Tekh. Poluprovodn 25, 1681 (1991)
Gen, C., Yu, V., Kaznacheev, A., Yunovich, A.E.: Sov. Phys. Semicond. 25, 1011 (1991)
Yi, K.S., Trivedi, K., Floresca, H.C., Yuk, H., Hu, W., Kim, M.K.: Nano Lett. 11, 5465 (2011)
Niquet, Y.M., Lherbier, A., Quang, N.H., Fernández-Serra, M.V., Blasé, X., Delerue, C.: Phys. Rev. B 73, 165319 (2006)
Boulitrop, F., Dunstain, D.J.: Phys. Rev. B 28, 5923 (1983)
Searle, T.M., Jackson, W.A.: Philos. Mag. B 60, 237 (1989)
Giorgis, F., Pirri, C.F., Vinegoni, C., Pavesi, L.: Phys. Rev. B 60, 11572 (1999)
Yang, C.C., Li, S.: Phys. Rev. B 75, 165413 (2007)
Liu, D., Zhu, Y.F., Jiang, Q.: J. Phys. Chem. C 113, 10907 (2009)
Naher, U., Bjrnholm, S., Frauendorf, S., Garcias, F., Guet, C.: Phys. Rep. 285, 245 (1997)
Nanda, K.K., Sahu, S.N., Behera, S.N.: Phys. Rev. A 66, 013208 (2002)
Rose, J.R., Vary, J.P., Smith, J.R.: Phys. Rev. Lett. 53, 344 (1984)
Rose, J.R., Smith, J.R., Ferrante, J.: Phys. Rev. B 28, 1835 (1983)
Qi, W.H., Wang, M.P., Xu, G.Y.: Chem. Phys. Lett. 372, 632 (2004)
Sun, C.Q., Shi, Y., Li, C.M., Li, S., Yeung, T.C.: Phys. Rev. B 73, 075408 (2006)
Delerue, C., Allan, G., Lannoo, M.: Phys. Rev. B 48, 11024 (1993)
Wu, Z., Neaton, J.B., Grossman, J.C.: Phys. Rev. Lett. 100, 246804 (2008)
Li, S., Wang, G.W.: Appl. Phys. Lett. 95, 073106 (2009)
Li, M., Li, J.C.: Mater. Lett. 60, 2526 (2006)
Verma, A.S.: Phys. Status Solidi (b) 246, 345 (2009)
Rotaru, C., Nastase, S., Tomozeiu, N.: Phys. Status Solidi (a) 171, 365 (1999)
Chen, C.-W., Chen, K.-H., Shen, C.-H., Ganguly, A., Chen, L.-C., Wu, J.-J., Wen, H.-I., Pong, W.-F.: Appl. Phys. Lett. 88, 241905 (2006)
Robertson, J.: Eur. Phys. J. Appl. Phys. 28, 265 (2004)
Robertson, J.: Rep. Prog. Phys. 69, 327 (2006)
Lee, J., Spector, H.N.: J. Appl. Phys. 54, 3921 (1983)
Salfi, J., Philipose, U., Aouba, S., Nair, S.V., Ruda, H.E.: Appl. Phys. Lett. 90, 032104 (2007)
Motayed, A., Vaudin, M., Davydov, A.V., Melngailis, J., He, M., Mohammad, S.N.: Appl. Phys. Lett. 90, 043104 (2007)
Cimpoiasu, E., Stern, E., Cheng, G., Munden, R., Sanders, A., Reed, M.A.: Braz. J. Phys. 36, 824 (2006)
Nag, B.R.: Electrical transport in compound semiconductors. Springer, New York, NY (1980)
Ramayya, E.B., Valiseska, D., Goodnick, S.M., Knezevic, I.: IEEE Trans. Nanotechnol. 6, 113 (2007)
Read, W.T.: Philos. Mag. 45, 775 (1954)
Read, W.T.: Philos. Mag. 46, 111 (1954)
Podor, B.: Phys. Status Solidi 16, K167 (1966)
Cui, Y., Zhong, Z., Wang, D., Wang, W.U., Lieber, C.M.: Nano Lett. 3, 149 (2003)
Koo, S.M., Fujiwara Han, A.J.P., Vogel, E.M., Richter, C.A., Bonevich, J.E.: Nano Lett. 4, 2197 (2004)
Takagi, S., Koga, J., Toriumi, A.: Jpn. J. Appl. Phys. 37, 1289 (1998)
Ford, A.C., Ho, J.C., Chueh, Y.L., Tseng, Y.C., Fan, Z., Guo, J., Bokor, J., Javery, A.: Nano Lett. 9, 360 (2009)
Trivedi, K., Yuk, H., Floresca, H.C., Kim, M.J., Hu, W.: Nano Lett. 11, 1412 (2011)
Thelander, C., Agarwal, P., Brongersma, S., Eymery, J., Feiner, L.F., Forchel, A., Scheffer, M., Riess Ohlsson, W.B.J., Goesel, U., Samuelson, L.: Mater. Today 9, 28 (2006)
Khanal, D.R., Yim, J.W.L., Walukiewicz, W., Wu, J.: Nano Lett. 7, 1186 (2007)
Huang, Y., Duan, X., Cui, Y., Lauhon, L.J., Kim, K.H., Lieber, C.M.: Nano Lett. 2, 101 (2002)
Chang, C.-Y., Chi, G.-C., Wang, W.-M., Chen, L.-C., Chen, K.-H., Ren, F., Pearton, S.J.: Appl. Phys. Lett. 87, 093112 (2005)
Stern, E., Cheng, G., Cimpoiasu, E., Klie, R., Guthrie, S., Klemic, J., Kretzschmar, I., Steinlauf, E., Turner-Evans, D., Broom-field, E., Hyland, J., Koudelka, R., Boone, T., Young, M., Sanders, A., Munden, R., Lee, T., Routenberg, D., Reed, M.A.: Nanotechnology 16, 2941 (2005)
Cheng, G., Stern, E., Turner-Evans, D., Reed, M.A.: Appl. Phys. Lett. 87, 253103 (2005)
Jiang, Y., Liow, T.Y., Singh, N., Tan, L.H., Lo, G.Q., Chan, D.S.H., Kwong, D.L. In: IEEE Symposium on VLSI Technology Digest of Technical Papers, p. 34 (2008)
Jin, S., Fischetti, M.V., Tang, T.W.: J. Appl. Phys. 102, 083715 (2007)
Neophytou, N., Kosina, H.: Solid State Electron. 70, 81 (2012)
Persson, M.P., Mera, H., Niques, Y.-M., Delerue, C.: Phys. Rev. B 82, 115318 (2010)
Koley, G., Cai, Z., Quddus, E.B., Liu, J., Qazi, M., Webb, R.A.: Nanotechnology 22, 295701 (2011)
Murphy-Armando, F., Fagas, G., Greer, J.C.: Nano Lett. 10, 869 (2010)
Zhang, W., Delerue, C., Niquet, Y.-M., Allan, G., Wang, E.: Phys. Rev. B 82, 115319 (2010)
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Khan, A., Ganji, S., Mohammad, S.N. (2013). Model for Quantum Confinement in Nanowires and the Application of This Model to the Study of Carrier Mobility in Nanowire FinFETs. In: Han, W., Wang, Z. (eds) Toward Quantum FinFET. Lecture Notes in Nanoscale Science and Technology, vol 17. Springer, Cham. https://doi.org/10.1007/978-3-319-02021-1_2
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