Abstract
This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.
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© 2006 CISM, Udine
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Lazarov, K.V., Enikov, E.T. (2006). Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection. In: De Bona, F., Enikov, E.T. (eds) Microsystems Mechanical Design. CISM International Centre for Mechanical Sciences, vol 478. Springer, Vienna. https://doi.org/10.1007/978-3-211-48549-1_5
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DOI: https://doi.org/10.1007/978-3-211-48549-1_5
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-37453-5
Online ISBN: 978-3-211-48549-1
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