Abstract
Electrostatic actuated flexible structure are frequently encountered in microsystems. The behaviour of these devices is characterized by electromechanical coupling, due to the mutual interaction between the electrostatic field and the deflection of the structure. A common case, frequently analyzed in the literature, is that of cantilever beam loaded electrostatically; in this case different analytical approaches based on a strong simplification of the elctromechanical model are available. If a more accurate analysis has to be performed, methods based on numerical techniques have to be preferred. In this case possible approaches are: lumped models, methods based on a Newton’s non-linear solution scheme, sequential field coupling algorithms.
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De Bona, F., Munteanu, M.G. (2006). Continuum Microstructures Loaded Electrostatically. In: De Bona, F., Enikov, E.T. (eds) Microsystems Mechanical Design. CISM International Centre for Mechanical Sciences, vol 478. Springer, Vienna. https://doi.org/10.1007/978-3-211-48549-1_4
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DOI: https://doi.org/10.1007/978-3-211-48549-1_4
Publisher Name: Springer, Vienna
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