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Advanced Materials pp 85–95Cite as

Mechanical Properties Derived by Spherical Indentation of TiN Coating Deposited by a Method Combining Magnetron Sputtering and Arc Evaporation

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Part of the book series: Springer Proceedings in Materials ((SPM,volume 6))

Abstract

The chapter presents a comprehensive analysis of the nanoindentation derived mechanical characteristics (elastic modulus and indentation hardness) of the TiN coating deposited using the method combining magnetron sputtering and arc evaporation on a steel substrate. For the nanoindentation experiments, spherical indenter was used. The results of studies of microstructure, chemical composition, and also measurements of the coating thickness using a focused ion beam on a scanning electron microscope are presented.

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Acknowledgements

This research was supported by RFBR grants Nos. 18-07-01397-a, 18-07-01177-a, and 18-57-00015 Bel_a. Experiments on nanoindentation, SEM and AFM were conducted in the Nanocenter of the Research and Education Center “Materials” (http://nano.donstu.ru/). E. V. Sadyrin was supported by the scholarship of the President of the Russian Federation No. SP-3672.2018.1.

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Authors and Affiliations

  1. Research and Education Center “Materials”, Don State Technical University, Rostov-on-Don, Russia

    Evgeniy Sadyrin, Roman Karotkiyan, Igor Zabiyaka, Evgeniy Kislyakov & Alexander Litvinenko

  2. Volga State University of Technology, Yoshkar-Ola, Russia

    Nikolay Sushentsov & Sergey Stepanov

Authors
  1. Evgeniy Sadyrin
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  2. Roman Karotkiyan
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  3. Nikolay Sushentsov
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  4. Sergey Stepanov
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  5. Igor Zabiyaka
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  6. Evgeniy Kislyakov
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  7. Alexander Litvinenko
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Correspondence to Evgeniy Sadyrin .

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Editors and Affiliations

  1. I. I. Vorovich Mathematics, Mechanics and Computer Sciences Institute, Southern Federal University, Rostov-on-Don, Russia

    Ivan A. Parinov

  2. Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan

    Shun-Hsyung Chang

  3. School of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi, Vietnam

    Banh Tien Long

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Sadyrin, E. et al. (2020). Mechanical Properties Derived by Spherical Indentation of TiN Coating Deposited by a Method Combining Magnetron Sputtering and Arc Evaporation. In: Parinov, I., Chang, SH., Long, B. (eds) Advanced Materials. Springer Proceedings in Materials, vol 6. Springer, Cham. https://doi.org/10.1007/978-3-030-45120-2_8

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