Abstract
In recent years, post-process high-speed, modern signal conditioning methods, low-power and low-cost microelectronic hybrid circuits and advances in miniaturisation technologies have driven improvements in sensor manufacturing [1]. Additionally, the sensor must have a high degree of efficiency relative to its calibration circumstances and sensing mechanism [1]. To save time and improve quality in the implementation of mass production processes, many simulation techniques and design aides can be utilised in the sensor design phase to predict and improve output data [1]. Furthermore, the miniaturisation of sensors offers a wide variety of advantages (e.g. low hysteresis and batch fabrication) [1].
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Acknowledgements
The authors are grateful to the ENERSENSE programme and NTNU Team Hydrogen at the Norwegian University of Science and Technology (NTNU) for supporting and helping on this book project.
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Wahl, M.S., Muri, H.I., Snilsberg, R.K., Lamb, J.J., Hjelme, D.R. (2020). Temperature and Humidity Measurements. In: Lamb, J., Pollet, B. (eds) Micro-Optics and Energy. Springer, Cham. https://doi.org/10.1007/978-3-030-43676-6_3
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